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Journal article(4)
Keyword
dislocation (4)
ELO (3)
HVPE (3)
Ga2O3 (2)
α-Ga2O3 (2)
etching (1)
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Keyword: dislocation
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Epitaxial lateral overgrowth of
m
-plane α-Ga
2
O
3
by halide vapor phase epitaxy
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takashi Shinohe
(author) (
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)
https://orcid.org/0009-0000-5559-1432
(unauthenticated)
Takashi Shinohe
Keyword
Ga2O3
,
dislocation
,
ELO
,
HVPE
Date published
2025-12-31
Updated at
2025-04-23 12:30:12 +0900
Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takashi Shinohe
(author) (
Search by this author
)
FLOSFIA INC.
Takashi Shinohe
Keyword
Ga2O3
,
dislocation
,
HVPE
,
ELO
Date published
2025-05-19
Updated at
2025-05-21 16:30:09 +0900
Epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy
Journal article
Creator
Y. Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Y. Oshima
;
K. Kawara
(author) (
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)
K. Kawara
;
T. Shinohe
(author) (
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)
T. Shinohe
;
T. Hitora
(author) (
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)
T. Hitora
;
M. Kasu
(author) (
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)
M. Kasu
;
S. Fujita
(author) (
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)
S. Fujita
Keyword
α-Ga2O3
,
HVPE
,
ELO
,
dislocation
Date published
2019-02-01
Updated at
2024-01-29 16:48:15 +0900
Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
Journal article
Creator
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Shingo Yagyu
(author) (
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)
Shingo Yagyu
;
Takashi Shinohe
(author) (
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)
Takashi Shinohe
Keyword
α-Ga2O3
,
dislocation
,
etching
Date published
2021-10-19
Updated at
2024-01-22 09:38:31 +0900
Keyword
dislocation
(4)
ELO
(3)
HVPE
(3)
Ga2O3
(2)
α-Ga2O3
(2)
etching
(1)
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Collection
Resource type
Journal article(4)
Keyword
dislocation (4)
ELO (3)
HVPE (3)
Ga2O3 (2)
α-Ga2O3 (2)
etching (1)
(more)
License
Creative Commons BY Attribution 4.0 International (1)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (1)
In Copyright (1)
File type
application/pdf (4)