Keyword: Ga2O3
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33 records found.

042110_1_5.0186319.pdf
Using selective-area growth and selective-area etching on (−102) β-Ga2O3 substrates to fabricate plasma-damage-free vertical fins and trenches
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, (-102), selective area growth, selective area etching
Date published
2024-01-22
Updated at
2025-01-25 12:30:12 +0900
Materials issues and devices of α- and β-Ga2O3.pdf
Materials issues and devices of α- and β-Ga2O3
Article
Creator
Elaheh Ahmadi ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, power device, epitaxy
Date published
2019-10-28
Updated at
2024-01-29 15:08:11 +0900
Figures181210.pdf
Halide Vapor Phase Epitaxy 2—Heteroepitaxial Growth of α- and ɛ-Ga2O3
Book
Creator
大島祐一 SAMURAI ORCID
Keyword
Ga2O3, HVPE
Date published
2020-04-24
Updated at
2024-01-30 10:29:29 +0900
gamma_SL.docx
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
Article
Creator
Yuji Kato ; Masataka Imura SAMURAI ORCID ; Yoshiko Nakayama SAMURAI ORCID ; Masaki Takeguchi SAMURAI ORCID ; Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, Superlattice
Date published
2019-06-01
Updated at
2024-01-05 22:11:34 +0900
alpha_SL.docx
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuji Kato ; Masataka Imura SAMURAI ORCID ; Yoshiko Nakayama SAMURAI ORCID ; Masaki Takeguchi SAMURAI ORCID
Keyword
Ga2O3, Superlattice
Date published
2018-06-01
Updated at
2024-01-05 22:12:13 +0900
NiO_Ga2O3.docx
Epitaxial relationship of NiO on (-102) β-Ga2O3
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Shinji Nakagomi
Keyword
Ga2O3, NiO, epitaxial relationship
Date published
2023-12-01
Updated at
2024-11-23 16:30:35 +0900
APEX-107351.docx
Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, HCl gas etching
Date published
2023-06-01
Updated at
2024-06-15 08:30:13 +0900
Manuscript_final .docx
Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, selective area growth
Date published
2022-07-01
Updated at
2024-01-05 22:13:27 +0900
T. Oshima_Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography.docx
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, lithography
Date published
2023-01-01
Updated at
2024-01-24 11:20:15 +0900
manuscript2022-11.pdf
High-performance β-Ga2O3 Schottky barrier diodes and metal-semiconductor field-effect transistors on a high doping level epitaxial layer
Article
Creator
Qihao Zhang ; Jiangwei Liu SAMURAI ORCID ; Chunming Tu ; Dongyuan Zhai ; Min He ; Jiwu Lu
Keyword
Ga2O3, Transistor
Date published
2023-01-03
Updated at
2025-01-04 16:30:50 +0900