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Collection
MDR lattice thermal conductivity calculation database(2)
MDR phonon calculation database(2)
Thermophysical Property Original Datasets(1)
MDR XAFS DB(1)
Resource type
Article(26)
Dataset(6)
Book(1)
Keyword
Ga2O3 (33)
HVPE (5)
TMAH (3)
dislocation (3)
ELO (2)
HCl gas etching (2)
Lattice thermal conductivity (2)
Phonon (2)
Superlattice (2)
etching (2)
(more)
License
Creative Commons BY Attribution 4.0 International (17)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (7)
In Copyright (7)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
Creative Commons BY-NC-SA Attribution-NonCommercial-ShareAlike 4.0 International (1)
File type
application/pdf (21)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (7)
image/png (5)
application/x-xz (4)
text/x-log (2)
application/json (1)
application/octet-stream (1)
application/zip (1)
text/plain (1)
text/tab-separated-values (1)
Chemical composition
Gallium(III) Oxide (1)
Ga2O3 (1)
Analysis field
spectroscopy (1)
Measurement method
dynamic mechanical analysis (1)
x-ray absorption spectroscopy (1)
Material type
Oxide (1)
Structural feature for specimen
melt (1)
local structure (1)
Keyword: Ga2O3
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33 records found.
Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows
Article
Creator
Yuichi Oshima
; Takashi Shinohe
Keyword
Ga2O3
,
dislocation
,
HVPE
,
ELO
Date published
2025-05-19
Updated at
2025-05-21 16:30:09 +0900
Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching
Article
Creator
Takayoshi Oshima
;
Yuichi Oshima
Keyword
Ga2O3
,
HCl gas etching
,
air bridge
Date published
2025-05-01
Updated at
2025-05-07 12:30:22 +0900
Epitaxial lateral overgrowth of
m
-plane α-Ga
2
O
3
by halide vapor phase epitaxy
Article
Creator
Yuichi Oshima
;
Takashi Shinohe
Keyword
Ga2O3
,
dislocation
,
ELO
,
HVPE
Date published
2025-12-31
Updated at
2025-04-23 12:30:12 +0900
Near-vertical plasma-free HCl gas etching on (011) β-Ga
2
O
3
Article
Creator
Takayoshi Oshima
;
Yuichi Oshima
Keyword
Ga2O3
,
crystallographic etching
,
(011)
Date published
2025-01-01
Updated at
2026-01-24 15:43:35 +0900
Luminescence properties of dislocations in α-Ga
2
O
3
Article
Creator
Mugove Maruzane
;
Yuichi Oshima
;
Olha Makydonska
;
Paul R Edwards
;
Robert W Martin
;
Fabien C-P Massabuau
Keyword
Ga2O3
,
dislocation
Date published
2025-01-20
Updated at
2024-11-13 08:31:40 +0900
Plasma-free anisotropic selective-area etching of β-Ga
2
O
3
using forming gas under atmospheric pressure
Article
Creator
Takayoshi Oshima
;
Rie Togashi
;
Yuichi Oshima
Keyword
Ga2O3
,
forming gas
,
anisotropic etching
,
plasma-free process
Date published
2024-12-31
Updated at
2024-07-31 12:30:20 +0900
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
Article
Creator
Takayoshi Oshima
;
Yuichi Oshima
Keyword
Ga2O3
,
etching
,
HCl
Date published
2023-04-17
Updated at
2024-05-29 08:30:12 +0900
Photoelectron holographic study for atomic site occupancy for Si dopants in Si-doped κ-Ga2O3(001)
Article
Creator
Yuhua Tsai
; Yusuke Hashimoto ; ZeXu Sun ; Takuya Moriki ; Takashi Tadamura ;
Takahiro Nagata
; Piero Mazzolini ; Antonella Parisini ; Matteo Bosi ; Luca Seravalli ; Tomohiro Matsushita ;
Yoshiyuki Yamashita
Keyword
Ga2O3
,
κ-Ga2O3
Date published
2024-04-03
Updated at
2025-03-07 12:30:11 +0900
Atomic position and the chemical state of an active Sn dopant for Sn-doped β-Ga2O3(001)
Article
Creator
Yuhua Tsai
;
Masaaki Kobata
;
Tatsuo Fukuda
;
Hajime Tanida
; Toru Kobayashi ;
Yoshiyuki Yamashita
Keyword
Ga2O3
,
dopant
,
b-Ga2O3
Date published
2024-03-11
Updated at
2024-03-19 12:30:20 +0900
Original dataset for ID 208 Ga2O3 in Thermophysical Property Database
Dataset
Collection
Thermophysical Property Original Datasets
Creator
Takehiko Ishikawa ;
Masashi Ishii
Keyword
Ga2O3
,
Ceramic
,
Density
,
ISS-ELF
,
Electrostatic Levitation
,
collection - Thermophys Datasets
Date published
Updated at
2024-03-30 18:40:44 +0900
Keyword
Ga2O3
(33)
HVPE
(5)
TMAH
(3)
dislocation
(3)
ELO
(2)
HCl gas etching
(2)
Lattice thermal conductivity
(2)
Phonon
(2)
Superlattice
(2)
etching
(2)
selective area growth
(2)
(-102)
(1)
(011)
(1)
Aichi SR
(1)
BL5S1
(1)
C2/m (12)
(1)
Ceramic
(1)
Cr2O3
(1)
Density
(1)
Electrostatic Levitation
(1)
Ga K-edge
(1)
Gallium(III) Oxide
(1)
HCl
(1)
ISS-ELF
(1)
MEMS
(1)
NiO
(1)
Oxide
(1)
R-3c (167)
(1)
Si(111)
(1)
Transistor
(1)
Wet etching
(1)
XAFS
(1)
air bridge
(1)
anisotropic etching
(1)
b-Ga2O3
(1)
collection - MDR XAFS DB
(1)
collection - Thermophys Datasets
(1)
crystallographic etching
(1)
dopant
(1)
epitaxial relationship
(1)
epitaxy
(1)
fcc
(1)
forming gas
(1)
lithography
(1)
plasma-free
(1)
plasma-free process
(1)
power device
(1)
selective area etching
(1)
wet etching
(1)
κ-Ga2O3
(1)
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