Download all files (1.65 MB)

Collection

Citation

Alternative title: ハライド気相成長法２ - α- および ε-Ga2O3 のヘテロエピ成長

Description:

αおよびε酸化ガリウムのHVPE成長について解説する。

Rights:

• In Copyright
  

Keyword: Ga2O3, HVPE

Date published: 2020-04-24

Publisher: Springer

Journal:

• Gallium Oxide: Crystal Growth, Materials Properties, and Devices (Springer)

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4363

First published URL: https://link.springer.com/chapter/10.1007/978-3-030-37153-1_11

Related item:

Other identifier(s):

Contact agent:

Updated at: 2024-01-30 10:29:29 +0900

Published on MDR: 2024-01-30 12:30:20 +0900