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Filtering by: Author Yuichi Oshima Type of work Publication

Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along &lt;-12-10...

Epitaxial growth of phase-pure e-Ga2O3 by halide vapor phase epitaxy

Hydride Vapor Phase Epitaxy and characterization of High-Quality ScN epilayers

Progress and challenges in the development of ultra-wide bandgap semiconductor α-Ga2O3...

Materials issues and devices of α- and β-Ga2O3

Halide Vapor Phase Epitaxy of twin-free a-Ga2O3 on sapphire (0001) substrates

Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching

Quasi-heteroepitaxial growth of β-Ga2O3 on off-angled sapphire (0001) substrates by Ha...

Rapid growth of α-Ga2O3 by HCl-boosted halide vapor phase epitaxy and effect of precur...

Growth and etching characteristics of (001) β- Ga2O3 by plasma-assisted molecular beam...

In-plane orientation control of (001) κ-Ga2O3 by epitaxial lateral overgrowth through ...

Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy

Elimination of threading dislocations in α-Ga2O3 by double layered epitaxial lateral o...

Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-...

Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy

Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas