キーワード: Ga2O3
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39 件のレコードが見つかりました。 1件目から10件目まで表示します。

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article.pdf
Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles
ジャーナル論文
著者
ORCID SAMURAI
キーワード
Ga2O3, TMAH
刊行年月日
2026-02-01
更新時刻
2026-02-25 12:30:03 +0900
alpha_SL.docx
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
ジャーナル論文
著者
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yuji Kato (author) (この著者で検索)
;
Masataka Imura (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yoshiko Nakayama (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Masaki Takeguchi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Ga2O3, Superlattice
刊行年月日
2018-06-01
更新時刻
2024-01-05 22:12:13 +0900
APEX-107351.docx
Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
ジャーナル論文
著者
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Ga2O3, HCl gas etching
刊行年月日
2023-06-01
更新時刻
2024-06-15 08:30:13 +0900
Maruzane_2025_J._Phys._D__Appl._Phys._58_03LT02.pdf
Luminescence properties of dislocations in α-Ga2O3
ジャーナル論文
著者
Mugove Maruzane (author) (この著者で検索)
ORCID ; ORCID SAMURAI ;
Olha Makydonska (author) (この著者で検索)
ORCID ;
Paul R Edwards (author) (この著者で検索)
ORCID ;
Robert W Martin (author) (この著者で検索)
ORCID ;
Fabien C-P Massabuau (author) (この著者で検索)
ORCID
キーワード
Ga2O3, dislocation
刊行年月日
2025-01-20
更新時刻
2024-11-13 08:31:40 +0900
nohighlight_Si-K-Ga2O3_resubmit_2403011908_revYY.pdf
Photoelectron holographic study for atomic site occupancy for Si dopants in Si-doped κ-Ga2O3(001)
ジャーナル論文
著者
Yuhua Tsai (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Nano Electronics Device Materials Group
ORCID ;
Yusuke Hashimoto (author) (この著者で検索)
NAIST
;
ZeXu Sun (author) (この著者で検索)
NAIST
;
Takuya Moriki (author) (この著者で検索)
NAIST
;
Takashi Tadamura (author) (この著者で検索)
NAIST
;
Takahiro Nagata (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Nano Electronics Device Materials Group
ORCID SAMURAI ;
Piero Mazzolini (author) (この著者で検索)
University of Parma
;
Antonella Parisini (author) (この著者で検索)
University of Parma
;
Matteo Bosi (author) (この著者で検索)
IMEM-CNR
;
Luca Seravalli (author) (この著者で検索)
IMEM-CNR
;
Tomohiro Matsushita (author) (この著者で検索)
NAIST
;
Yoshiyuki Yamashita (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Nano Electronics Device Materials Group
ORCID SAMURAI
キーワード
Ga2O3, κ-Ga2O3
刊行年月日
2024-04-03
更新時刻
2025-03-07 12:30:11 +0900
Nabatame_d-SiO2-Ga2O3 2026_ECS_J._Solid_State_Sci._Technol._15_064005.pdf
Characteristics of β-Ga2O3/Al2O3/Pt capacitors with a Ga2O3 surface modified using the dummy-SiO2 process
ジャーナル論文
著者
Toshihide Nabatame (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)
ORCID SAMURAI ;
Yoshihiro Irokawa (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Tomomi Sawada (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
;
Hiromi Miura (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
;
Manami Miyamoto (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
;
Takashi Onaya (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
ORCID ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group
ORCID SAMURAI ;
Kazuhito Tsukagoshi (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
ORCID SAMURAI
キーワード
Ga2O3, atomic layer deposition, dummy-SiO2, Al2O3, positive bias stress
刊行年月日
2026-06-01
更新時刻
2026-08-18 11:30:17 +0900
再々投稿_260324.docx
Photoelectron Holographic Study of Atomic Structure of Si Dopants for Si-doped κ-Ga2O3(001)
ジャーナル論文
著者
Yoshiyuki YAMASHITA (author) (この著者で検索)
;
Yuhua TSAI (author) (この著者で検索)
;
Yusuke HASHIMOTO (author) (この著者で検索)
;
Tomohiro MATSUSHITA (author) (この著者で検索)
;
Piero MAZZOLINI (author) (この著者で検索)
キーワード
Photoelectron Holography, Ga2O3, dopant
刊行年月日
2026-07-10
更新時刻
2026-08-05 15:56:53 +0900
042110_1_5.0186319.pdf
Using selective-area growth and selective-area etching on (−102) β-Ga2O3 substrates to fabricate plasma-damage-free vertical fins and trenches
ジャーナル論文
著者
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI
キーワード
Ga2O3, (-102), selective area growth, selective area etching
刊行年月日
2024-01-22
更新時刻
2025-01-25 12:30:12 +0900
jjap_64_8_088001.pdf
Step-and-terrace surface formation on (001) β-Ga2O3 by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer
ジャーナル論文
著者
ORCID SAMURAI
キーワード
Ga2O3, TMAH, Wet etching
刊行年月日
2025-08-01
更新時刻
2025-08-18 16:30:36 +0900
Physica Status Solidi b - 2025 - Penman - Comparative Study of the Optical Properties of ‐ ‐ and ‐Ga2O3.pdf
Comparative Study of the Optical Properties of α‐, β‐, and κ‐Ga2O3
ジャーナル論文
著者
Lewis T. Penman (author) (この著者で検索)
ORCID ;
Zak M. Johnston (author) (この著者で検索)
;
Paul R. Edwards (author) (この著者で検索)
ORCID ; ORCID SAMURAI ;
Clifford McAleese (author) (この著者で検索)
;
Piero Mazzolini (author) (この著者で検索)
ORCID ;
Matteo Bosi (author) (この著者で検索)
ORCID ;
Luca Seravalli (author) (この著者で検索)
ORCID ;
Roberto Fornari (author) (この著者で検索)
;
Robert W. Martin (author) (この著者で検索)
ORCID ;
Fabien C.‐P. Massabuau (author) (この著者で検索)
ORCID
キーワード
Ga2O3
刊行年月日
2025-02-12
更新時刻
2025-08-18 16:30:52 +0900
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