キーワード: Ga2O3
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8 件のレコードが見つかりました。 1件目から8件目まで表示します。

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nohighlight_Sn_dopedGa2O3_240222_v2_revYY.pdf
Atomic position and the chemical state of an active Sn dopant for Sn-doped β-Ga2O3(001)
ジャーナル論文
著者
Yuhua Tsai (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Masaaki Kobata (author) (この著者で検索)
ORCID ;
Tatsuo Fukuda (author) (この著者で検索)
ORCID ;
Hajime Tanida (author) (この著者で検索)
ORCID ;
Toru Kobayashi (author) (この著者で検索)
;
Yoshiyuki Yamashita (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Ga2O3, dopant, b-Ga2O3
刊行年月日
2024-03-11
更新時刻
2024-03-19 12:30:20 +0900
再々投稿_260324.docx
Photoelectron Holographic Study of Atomic Structure of Si Dopants for Si-doped κ-Ga2O3(001)
ジャーナル論文
著者
Yoshiyuki YAMASHITA (author) (この著者で検索)
;
Yuhua TSAI (author) (この著者で検索)
;
Yusuke HASHIMOTO (author) (この著者で検索)
;
Tomohiro MATSUSHITA (author) (この著者で検索)
;
Piero MAZZOLINI (author) (この著者で検索)
キーワード
Photoelectron Holography, Ga2O3, dopant
刊行年月日
2026-07-10
更新時刻
2026-08-05 15:56:53 +0900
Nabatame_d-SiO2-Ga2O3 2026_ECS_J._Solid_State_Sci._Technol._15_064005.pdf
Characteristics of β-Ga2O3/Al2O3/Pt capacitors with a Ga2O3 surface modified using the dummy-SiO2 process
ジャーナル論文
著者
Toshihide Nabatame (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)
ORCID SAMURAI ;
Yoshihiro Irokawa (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Tomomi Sawada (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
;
Hiromi Miura (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
;
Manami Miyamoto (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
;
Takashi Onaya (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
ORCID ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group
ORCID SAMURAI ;
Kazuhito Tsukagoshi (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Thin Film Electronics Group
ORCID SAMURAI
キーワード
Ga2O3, atomic layer deposition, dummy-SiO2, Al2O3, positive bias stress
刊行年月日
2026-06-01
更新時刻
2026-08-18 11:30:17 +0900
nohighlight_Si-K-Ga2O3_resubmit_2403011908_revYY.pdf
Photoelectron holographic study for atomic site occupancy for Si dopants in Si-doped κ-Ga2O3(001)
ジャーナル論文
著者
Yuhua Tsai (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Nano Electronics Device Materials Group
ORCID ;
Yusuke Hashimoto (author) (この著者で検索)
NAIST
;
ZeXu Sun (author) (この著者で検索)
NAIST
;
Takuya Moriki (author) (この著者で検索)
NAIST
;
Takashi Tadamura (author) (この著者で検索)
NAIST
;
Takahiro Nagata (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Nano Electronics Device Materials Group
ORCID SAMURAI ;
Piero Mazzolini (author) (この著者で検索)
University of Parma
;
Antonella Parisini (author) (この著者で検索)
University of Parma
;
Matteo Bosi (author) (この著者で検索)
IMEM-CNR
;
Luca Seravalli (author) (この著者で検索)
IMEM-CNR
;
Tomohiro Matsushita (author) (この著者で検索)
NAIST
;
Yoshiyuki Yamashita (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Nano Electronics Device Materials Group
ORCID SAMURAI
キーワード
Ga2O3, κ-Ga2O3
刊行年月日
2024-04-03
更新時刻
2025-03-07 12:30:11 +0900
Plasma-free anisotropic selective-area etching of -Ga2O3 using forming gas under atmospheric pressure_organized.pdf
Plasma-free anisotropic selective-area etching of β-Ga 2 O 3 using forming gas under atmospheric pressure
ジャーナル論文
著者
ORCID SAMURAI ;
Rie Togashi (author) (この著者で検索)
ORCID ; ORCID SAMURAI
キーワード
Ga2O3, forming gas, anisotropic etching, plasma-free process
刊行年月日
2024-12-31
更新時刻
2024-07-31 12:30:20 +0900
jjap_64_8_088001.pdf
Step-and-terrace surface formation on (001) β-Ga2O3 by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer
ジャーナル論文
著者
ORCID SAMURAI
キーワード
Ga2O3, TMAH, Wet etching
刊行年月日
2025-08-01
更新時刻
2025-08-18 16:30:36 +0900
article.pdf
Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles
ジャーナル論文
著者
ORCID SAMURAI
キーワード
Ga2O3, TMAH
刊行年月日
2026-02-01
更新時刻
2026-02-25 12:30:03 +0900
alpha_SL.docx
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
ジャーナル論文
著者
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yuji Kato (author) (この著者で検索)
;
Masataka Imura (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yoshiko Nakayama (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Masaki Takeguchi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Ga2O3, Superlattice
刊行年月日
2018-06-01
更新時刻
2024-01-05 22:12:13 +0900
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