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Article and Dataset
Collection
Resource type
Journal article(27)
Report(1)
Keyword
Ga2O3 (21)
HVPE (4)
TMAH (4)
etching (4)
HCl gas etching (3)
selective area growth (3)
β-Ga2O3 (3)
(011) (2)
MEMS (2)
SnO2 (2)
(more)
License
Creative Commons BY Attribution 4.0 International (16)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (7)
In Copyright (5)
File type
application/pdf (21)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (8)
application/zip (1)
28 records found.
Rutile-type GexSn1−xO2 alloy layers lattice-matched to TiO2 substrates for device applications
Journal article
Creator
Hitoshi Takane
(author) (
Search by this author
)
https://orcid.org/0000-0001-8866-145X
(unauthenticated)
Hitoshi Takane
;
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Takayuki Harada
(author) (
Search by this author
)
https://orcid.org/0000-0002-8657-2258
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayuki Harada
;
Kentaro Kaneko
(author) (
Search by this author
)
https://orcid.org/0000-0001-6626-7611
(unauthenticated)
Kentaro Kaneko
;
Katsuhisa Tanaka
(author) (
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)
https://orcid.org/0000-0002-1409-2802
(unauthenticated)
Katsuhisa Tanaka
Keyword
GeO2
,
SnO2
,
TiO2
Date published
2024-01-01
Updated at
2024-02-01 09:41:54 +0900
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
Journal article
Creator
Yuji Kato
(author) (
Search by this author
)
Yuji Kato
;
Masataka Imura
(author) (
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)
https://orcid.org/0000-0002-4236-9549
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masataka Imura
;
Yoshiko Nakayama
(author) (
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)
https://orcid.org/0000-0002-7607-6779
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshiko Nakayama
;
Masaki Takeguchi
(author) (
Search by this author
)
https://orcid.org/0000-0002-0282-6020
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masaki Takeguchi
;
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
Superlattice
Date published
2019-06-01
Updated at
2024-01-05 22:11:34 +0900
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuji Kato
(author) (
Search by this author
)
Yuji Kato
;
Masataka Imura
(author) (
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)
https://orcid.org/0000-0002-4236-9549
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masataka Imura
;
Yoshiko Nakayama
(author) (
Search by this author
)
https://orcid.org/0000-0002-7607-6779
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshiko Nakayama
;
Masaki Takeguchi
(author) (
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)
https://orcid.org/0000-0002-0282-6020
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masaki Takeguchi
Keyword
Ga2O3
,
Superlattice
Date published
2018-06-01
Updated at
2024-01-05 22:12:13 +0900
Epitaxial relationship of NiO on (-102) β-Ga2O3
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
Research Center for Electronic and Optical Materials, National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shinji Nakagomi
(author) (
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)
Faculty of Science and Engineering, Ishinomaki Senshu University
Shinji Nakagomi
Keyword
Ga2O3
,
NiO
,
epitaxial relationship
Date published
2023-12-01
Updated at
2024-11-23 16:30:35 +0900
Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
HCl gas etching
Date published
2023-06-01
Updated at
2024-06-15 08:30:13 +0900
Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
selective area growth
Date published
2022-07-01
Updated at
2024-01-05 22:13:27 +0900
Growth dynamics of selective-area-grown rutile-type SnO2 on TiO2 (110) substrate
Journal article
Creator
Hitoshi Takane
(author) (
Search by this author
)
Hitoshi Takane
;
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Katsuhisa Tanaka
(author) (
Search by this author
)
Katsuhisa Tanaka
;
Kentaro Kaneko
(author) (
Search by this author
)
Kentaro Kaneko
Keyword
SnO2
,
selective area growth
Date published
2023-04-01
Updated at
2024-04-14 08:30:12 +0900
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
Keyword
Ga2O3
,
lithography
Date published
2023-01-01
Updated at
2024-01-24 11:20:15 +0900
Keyword
Ga2O3
(21)
HVPE
(4)
TMAH
(4)
etching
(4)
HCl gas etching
(3)
selective area growth
(3)
β-Ga2O3
(3)
(011)
(2)
MEMS
(2)
SnO2
(2)
Superlattice
(2)
air bridge
(2)
wet etching
(2)
(-102)
(1)
(−112)
(1)
AFM
(1)
AlInN
(1)
Cr2O3
(1)
GaN
(1)
GeO2
(1)
HCl
(1)
NiO
(1)
TEM
(1)
TiO2
(1)
Wet etching
(1)
anisotropic etching
(1)
cantilever
(1)
crystallographic etching
(1)
epitaxial relationship
(1)
fcc
(1)
forming gas
(1)
lithography
(1)
plasma-free
(1)
plasma-free process
(1)
positive bevel edge termination
(1)
selective area etching
(1)
微細加工
(1)
選択ガスエッチング
(1)
選択成長
(1)
酸化ガリウム
(1)
RDE metadata def
RDE invoice schema
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