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Resource type
Article(9)
Proceedings(2)
Keyword
gallium nitride (11)
atom probe tomography (5)
transmission electron microscopy (4)
cathodoluminescence (2)
scanning transmission electron microscopy (2)
FNO (1)
GaN (1)
HAXPES (1)
activation (1)
defect passivation (1)
(more)
License
Creative Commons BY Attribution 4.0 International (5)
In Copyright (4)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (1)
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application/pdf (11)
File type: application/pdf
Keyword: gallium nitride
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11 records found.
Characterization of Vacancy-Type Defects in Mg- and N-Implanted GaN by Using a Monoenergetic Positron Beam
Article
Creator
A. Uedono
;
R. Tanaka
;
S. Takashima
; K. Ueno ; M. Edo ;
K. Shima
; S. F. Chichibu ;
J. Uzuhashi
;
T. Ohkubo
;
S. Ishibashi
; K. Sierakowski ;
M. Bockowski
Keyword
gallium nitride
Date published
2025-08-27
Updated at
2026-01-05 13:57:59 +0900
Characterization of Vacancy-Type Defects in Mg- and N-Implanted GaN by using a Monoenergetic Positron Beam
Proceedings
Creator
Akira Uedono ; Ryo Tanaka ; Shinya Takashima ; Katsunori Ueno ; Masaharu Edo ; Kohei Shima ; Shigefusa F. Chichibu ;
Jun Uzuhashi
;
Tadakatsu Ohkubo
; Shoji Ishibashi ; Kacper Sierakowski ; Michal Bockowski
Keyword
gallium nitride
Date published
2025-06-04
Updated at
2025-09-17 16:30:20 +0900
Effects of nitrosyl fluoride based gas treatment on fluorination and redox reaction at GaN surface and Pt/GaN interface
Article
Creator
Takahiro Nagata
;
Asahiko Matsuda
;
Takashi Teramoto
;
Dominic Gerlach
;
Peng Shen
;
Shigenori Ueda
;
Takako Kimura
;
Christian Dussarrat
;
Toyohiro Chikyow
Keyword
gallium nitride
,
GaN
,
nitrosyl fluoride
,
FNO
,
HAXPES
,
defect passivation
,
fluorination
Date published
2025-03-07
Updated at
2025-03-26 17:26:31 +0900
Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN
Article
Creator
Emi Kano
;
Jun Uzuhashi
; Koki Kobayashi ; Kosuke Ishikawa ; Kyosuke Sawabe ; Tetsuo Narita ; Kacper Sierakowski ; Michal Bockowski ;
Tadakatsu Ohkubo
; Tetsu Kachi ;
Nobuyuki Ikarashi
Keyword
gallium nitride
,
atom probe tomography
,
transmission electron microscopy
Date published
2024-04-22
Updated at
2024-09-20 16:30:27 +0900
Effect of sequential N ion implantation in the formation of a shallow Mg-implanted p-type GaN layer
Article
Creator
Jun Uzuhashi
;
Jun Chen
; Ryo Tanaka ; Shinya Takashima ; Masaharu Edo ;
Tadakatsu Ohkubo
; Takashi Sekiguchi
Keyword
gallium nitride
,
atom probe tomography
,
transmission electron microscopy
,
cathodoluminescence
Date published
2024-08-07
Updated at
2024-08-03 08:30:15 +0900
Vacancy‐Type Defects and Their Trapping/Detrapping of Charge Carriers in Ion‐Implanted GaN Studied by Positron Annihilation
Article
Creator
Akira Uedono
;
Ryo Tanaka
;
Shinya Takashima
; Katsunori Ueno ; Masaharu Edo ;
Kohei Shima
;
Shigefusa F. Chichibu
;
Jun Uzuhashi
;
Tadakatsu Ohkubo
;
Shoji Ishibashi
;
Kacper Sierakowski
;
Michal Bockowski
Keyword
gallium nitride
Date published
2024-02-29
Updated at
2025-03-01 12:30:45 +0900
Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs
Proceedings
Creator
Ryo Tanaka ; Shinya Takashima ; Katsunori Ueno ; Masahiro Horita ; Jun Suda ;
Jun Uzuhashi
;
Tadakatsu Ohkubo
; Masaharu Edo
Keyword
gallium nitride
,
atom probe tomography
,
transmission electron microscopy
Date published
2023-06-08
Updated at
2024-04-19 12:30:23 +0900
Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation
Article
Creator
Emi Kano ; Keita Kataoka ;
Jun Uzuhashi
; Kenta Chokawa ; Hideki Sakurai ; Akira Uedono ; Tetsuo Narita ; Kacper Sierakowski ; Michal Bockowski ; Ritsuo Otsuki ; Koki Kobayashi ; Yuta Itoh ; Masahiro Nagao ;
Tadakatsu Ohkubo
;
Kazuhiro Hono
; Jun Suda ; Tetsu Kachi ; Nobuyuki Ikarashi
Keyword
gallium nitride
,
transmission electron microscopy
,
atom probe tomography
Date published
2022-08-14
Updated at
2024-01-05 22:13:58 +0900
Annealing properties of vacancy-type defects in ion implanted GaN during ultra-high-pressure annealing studied by using a monoenergetic positron beam
Article
Creator
Akira Uedono ; Hideki Sakurai ;
Jun Uzuhashi
; Tetsuo Narita ; Kacper Sierakowski ; Shoji Ishibashi ; Shigefusa F. Chichibu ; Michal Bockowski ; Jun Suda ; Tadakatsu Ohokubo ; Nobuyuki Ikarashi ;
Kazuhiro Hono
; Tetsu Kachi
Keyword
gallium nitride
,
vacancy
,
positron
Date published
2023-03-15
Updated at
2024-01-05 22:12:35 +0900
Acceptor activation of Mg-doped GaN—Effects of N2/O2 vs N2 as ambient gas during annealing
Article
Creator
Ashutosh Kumar
; Martin Berg ; Qin Wang ;
Jun Uzuhashi
;
Tadakatsu Ohkubo
; Michael Salter ; Peter Ramvall
Keyword
gallium nitride
,
scanning transmission electron microscopy
,
semiconductor
,
activation
Date published
2023-07-21
Updated at
2024-01-05 22:12:15 +0900
Keyword
gallium nitride
(11)
atom probe tomography
(5)
transmission electron microscopy
(4)
cathodoluminescence
(2)
scanning transmission electron microscopy
(2)
FNO
(1)
GaN
(1)
HAXPES
(1)
activation
(1)
defect passivation
(1)
fluorination
(1)
implantation
(1)
nitrosyl fluoride
(1)
positron
(1)
semiconductor
(1)
vacancy
(1)
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