MDR: NIMS Materials Data Repository

キーワード: MEMS

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25 件のレコードが見つかりました。

Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications

プレゼンテーション
著者: Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi KOIZUMI (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-11-06 12:30:32 +0900

Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C

プロシーディングス論文
著者: Zilong Zhang (author) (この著者で検索)

;

Keyun Gu (author) (この著者で検索)

;

Guo Chen (author) (この著者で検索)

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS, magnetic sensors
刊行年月日: 2024-05-02
更新時刻: 2025-01-25 08:30:41 +0900

Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond

プレゼンテーション
著者: Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-11-06 12:30:27 +0900

Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS

ジャーナル論文
著者: Guo Chen (author) (この著者で検索)

;

Zilong Zhang (author) (この著者で検索)

;

Yasuo Koide (author) (この著者で検索)

;

Satoshi Koizumi (author) (この著者で検索)

;

Zhaohui Huang (author) (この著者で検索)

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日: 2023-07-26
更新時刻: 2025-07-26 08:30:34 +0900

High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry

プレゼンテーション
著者: Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zhaozong Zhang (author) (この著者で検索)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi KOIZUMI (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond,, MEMS
刊行年月日
更新時刻: 2026-01-09 11:00:08 +0900

Oshima_2025_Appl._Phys._Express_18_116501-1.pdf

Fabrication of β -Ga ₂ O ₃ /air-gap structures on (010) β -Ga ₂ O ₃ by wet etching in tetramethylammonium hydroxide (TMAH)

ジャーナル論文
著者: Takayoshi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8550-9735

NIMS Researchers Directory SAMURAI
キーワード: Ga2O3, TMAH, wet etching, MEMS
刊行年月日: 2025-11-01
更新時刻: 2025-11-27 08:30:13 +0900

A perspective on diamond MEMS magnetic sensors

ジャーナル論文
著者: Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

;

Keyun Gu (author) (この著者で検索)

;

Masaya Toda (author) (この著者で検索)

https://orcid.org/0000-0003-3849-6948 (unauthenticated)

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS, magnetic sensors
刊行年月日: 2025-03-01
更新時刻: 2025-05-19 16:30:19 +0900

Abstract Oxygen-termination effect R.doc

Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS

プレゼンテーション
著者: Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Guo Chen (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Jian Huang (author) (この著者で検索)

China University of Geosciences

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: ダイヤモンド, MEMS
刊行年月日
更新時刻: 2025-04-12 08:30:28 +0900

High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method

会議発表ポスター
著者: Guo Chen (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日
更新時刻: 2025-05-22 08:30:08 +0900

30-Manuscript-WEN_2025-Liao 20250114.docx

Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators

ジャーナル論文
著者: Wen Zhao (author) (この著者で検索)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

;

Guo Chen (author) (この著者で検索)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

;

Tokuyuki Teraji (author) (この著者で検索)

https://orcid.org/0000-0002-7731-0547

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (この著者で検索)

;

Masaya Toda (author) (この著者で検索)

;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
キーワード: Diamond, MEMS
刊行年月日: 2025-07-28
更新時刻: 2025-10-28 12:30:23 +0900

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