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説明:

Real-time multifunctional sensing of magnetic fields and temperatures with preserved performances from room temperature to 500℃ has posed a challenge for conventional sensing techniques. In this work, we demonstrate a smart multifunctional sensor based on single crystal diamond (SCD) MEMS resonators that can sense both magnetic fields and temperatures up to 500℃. Our strategy is to integrate a magnetostrictive thin film (Curie temperature >650℃) and a non-magnetic thin film on different SCD MEMS resonators on the same SCD chip for magnetic field sensing and temperature sensing, respectively. The multifunctional SCD MEMS sensor can achieve simultaneous sensing of temperatures and magnetic fields with high reliability up to 500℃, the best among all the semiconductors. The concept of SCD-MEMS based multifunctional sensors offers a promising solution for developing multifunctional sensors of magnetic sensing and temperature sensing under harsh environments.

権利情報:

• In Copyright
  

  This work has been submitted to the IEEE for possible publication. Copyright may be transferred without notice, after which this version may no longer be accessible.

キーワード: Diamond, MEMS, magnetic sensors

刊行年月日: 2024-05-02

出版者: IEEE

掲載誌:

• 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (ISSN: 24743755) p. 1-5

会議:

研究助成金:

• Ministry of Education

原稿種別: 査読前原稿 (Author's original)

MDR DOI: https://doi.org/10.48505/nims.5295

公開URL: https://doi.org/10.1109/nems60219.2024.10639932

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更新時刻: 2025-01-25 08:30:41 +0900

MDRでの公開時刻: 2025-01-25 08:30:41 +0900