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Description:

Real-time multifunctional sensing of magnetic fields and temperatures with preserved performances from room temperature to 500℃ has posed a challenge for conventional sensing techniques. In this work, we demonstrate a smart multifunctional sensor based on single crystal diamond (SCD) MEMS resonators that can sense both magnetic fields and temperatures up to 500℃. Our strategy is to integrate a magnetostrictive thin film (Curie temperature >650℃) and a non-magnetic thin film on different SCD MEMS resonators on the same SCD chip for magnetic field sensing and temperature sensing, respectively. The multifunctional SCD MEMS sensor can achieve simultaneous sensing of temperatures and magnetic fields with high reliability up to 500℃, the best among all the semiconductors. The concept of SCD-MEMS based multifunctional sensors offers a promising solution for developing multifunctional sensors of magnetic sensing and temperature sensing under harsh environments.

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Keyword: Diamond, MEMS, magnetic sensors

Date published: 2024-05-02

Publisher: IEEE

Journal:

• 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (ISSN: 24743755) p. 1-5

Conference:

Funding:

• Ministry of Education

Manuscript type: Author's version (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.5295

First published URL: https://doi.org/10.1109/nems60219.2024.10639932

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Updated at: 2025-01-25 08:30:41 +0900

Published on MDR: 2025-01-25 08:30:41 +0900