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説明:

Next-generation thermometry requires ultrahigh temperature sensitivity, precision, and microscale or nanoscale spatial resolution for bio-calorimetry, optoelectronic sensing, quantum science, energy storage, and thermal management of electronic devices. Current thermometry approaches based on thermocouple, resistive, and optical mechanisms suffer from various problems such as large volume, low resolution, high noise level, and narrow temperature range. Microelectromechanical system (MEMS) resonators hold great potential as thermometry due to the small size, batch fabrication, and facile integration with electrical circuits. However, mainstream silicon MEMS thermometry struggles with the trade-off between responsivity, temperature resolution, and sensitivity. In this work, we utilize the highest crystal quality single-crystal diamond and multi-mode resonance for MEMS cantilever thermometry to address these challenges. The resulting diamond MEMS thermometry exhibits unparalleled performance, with an ultra-high sensitivity of ≈22 nKHz−1/2, a high temperature resolution of 100 µK, and a wide-temperature range from 6.5 to 380 K. The groundbreaking sensing performance highlights the versatility and transformative potential of diamond MEMS resonator as the next-generation platform for ultrahigh-sensitivity and high-resolution temperature sensing in microscale or nanoscale space.

権利情報:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

キーワード: Diamond, MEMS

刊行年月日: 2025-07-28

出版者: Wiley

掲載誌:

• Advanced Materials (ISSN: 09359648) vol. 37 issue. 42 e02012

研究助成金:

原稿種別: 査読前原稿 (Author's original)

MDR DOI: https://doi.org/10.48505/nims.5827

公開URL: https://doi.org/10.1002/adma.202502012

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更新時刻: 2025-10-28 12:30:23 +0900

MDRでの公開時刻: 2025-10-28 12:16:24 +0900