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Keyword: MEMS

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24 records found.

edtm2025-paper-template-word_Liao 10.26.pdf

Single-Crystal Diamond MEMS for Extreme Sensors

Conference paper
Creator: Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS, sensors
Date published: 2025-03-09
Updated at: 2025-07-29 16:30:25 +0900

Low-Energy Dissipation Diamond MEMS

Journal article
Creator: Guo Chen (author) (Search by this author)

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published: 2024-09-27
Updated at: 2025-07-29 08:30:21 +0900

High-order resonance enhancing the mass sensitivity of diamond cantilevers

Journal article
Creator: Wen Zhao (author) (Search by this author)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

;

Guo Chen (author) (Search by this author)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

;

Keyun Gu (author) (Search by this author)

https://orcid.org/0000-0002-7505-7744 (unauthenticated)

;

Masaya Toda (author) (Search by this author)

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published: 2025-04-01
Updated at: 2025-07-12 08:30:35 +0900

High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method

Conference poster
Creator: Guo Chen (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Wen Zhao (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Keyun Gu (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published
Updated at: 2025-05-22 08:30:08 +0900

Single-Crystal Diamond MEMS Magnetic Sensor

Book
Creator: Zilong Zhang (author) (Search by this author)

https://orcid.org/0000-0002-9759-9253

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS, magnetic sensors
Date published: 2024-05-22
Updated at: 2024-10-21 12:30:45 +0900

NDNC2025_abstract_template -WEN_Finalized　Zhao_Liao.docx

Ultra-High-Resolution Thermometer Based on Diamond MEMS

Conference presentation
Creator: Wen Zhao (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Tokuyuki Teraji (author) (Search by this author)

https://orcid.org/0000-0002-7731-0547

Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

Research Center for Electronic and Optical Materials, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published
Updated at: 2025-05-22 08:30:40 +0900

Abstract Oxygen-termination effect R.doc

Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS

Conference presentation
Creator: Keyun Gu (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Zilong Zhang (author) (Search by this author)

https://orcid.org/0000-0002-9759-9253

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Wen Zhao (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Guo Chen (author) (Search by this author)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Jian Huang (author) (Search by this author)

China University of Geosciences

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

Research Center for Electronic and Optical Materials, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: ダイヤモンド, MEMS
Date published
Updated at: 2025-04-12 08:30:28 +0900

Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C

Conference paper
Creator: Zilong Zhang (author) (Search by this author)

;

Keyun Gu (author) (Search by this author)

;

Guo Chen (author) (Search by this author)

;

Yasuo Koide (author) (Search by this author)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

;

Satoshi Koizumi (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS, magnetic sensors
Date published: 2024-05-02
Updated at: 2025-01-25 08:30:41 +0900

30-Manuscript-WEN_2025-Liao 20250114.docx

Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators

Journal article
Creator: Wen Zhao (author) (Search by this author)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

;

Guo Chen (author) (Search by this author)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

;

Tokuyuki Teraji (author) (Search by this author)

https://orcid.org/0000-0002-7731-0547

NIMS Researchers Directory SAMURAI

;

Yasuo Koide (author) (Search by this author)

;

Masaya Toda (author) (Search by this author)

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI
Keyword: Diamond, MEMS
Date published: 2025-07-28
Updated at: 2025-10-28 12:30:23 +0900

High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry

Conference presentation
Creator: Wen Zhao (author) (Search by this author)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Guo Chen (author) (Search by this author)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Zhaozong Zhang (author) (Search by this author)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

;

Satoshi KOIZUMI (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI
Keyword: Diamond,, MEMS
Date published
Updated at: 2026-01-09 11:00:08 +0900

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