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説明:

Diamond has been demonstrated as an exceptional semiconductor for microelectromechanical system (MEMS) sensors, offering high sensitivity and reliability due to its ultra-wide bandgap energy, superior mechanical properties, and high thermal conductivity. For MEMS resonator-type sensors that rely on frequency shift detection, such as mass sensors, the overall performance, including the sensitivity, speed, resolution, and noise level, is collectively determined by the stability of the resonance frequency. To improve the sensing performance, geometry optimization and nonlinear operation methods have been used, but these methods lead to increased fabrication complexity or increased energy dissipation. In this work, we propose the utilization of high-order resonance modes to enhance the resonance frequency stability of single-crystal diamond (SCD) MEMS resonators, achieving a significant improvement in mass resolution to as low as 0.15 atto-grams at room temperature. This approach offers a streamlined and competitive strategy for advancing the sensing capabilities of MEMS sensors.

権利情報:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

キーワード: Diamond, MEMS

刊行年月日: 2025-04-01

出版者: AIP Publishing

掲載誌:

• APL Materials (ISSN: 2166532X) vol. 13 issue. 4

研究助成金:

• Japan Society for the Promotion of Science 24H00287
• Japan Society for the Promotion of Science 22K18957
• Japan Society for the Promotion of Science 24KF0085

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1063/5.0250902

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更新時刻: 2025-07-12 08:30:35 +0900

MDRでの公開時刻: 2025-07-12 08:17:26 +0900