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In this work, we propose a high-quality (Q) factor micro thermometer based on SCD cantilevers (Fig. 1(a)), which was fabricated by smart-cut method [1]. We use higher-order-modes (HOMs) to have both high resolution and sensitivity for precise detection of subtle temperature variations ranging from 380 K to 6.5K. By operation at HOMs (Fig. 1(b)), the experimental resolution of 10 mK (facility limit) was identified and an estimated resolution of 100 µK and a noise equivalent temperature of 22 nK/Hz1/2 were achieved. The temperature resolution and noise level establish new global benchmarks in temperature sensors among MEMS sensors. This work underscores the versatility and transformative potential of the diamond MEMS resonator as an advanced platform for ultra-high-resolution temperature sensing.

権利情報:

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キーワード: Diamond, MEMS

会議: The 18th International Conference on New Diamond and Nano Carbons (2025-05-11 - 2025-05-15)

研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.5494

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更新時刻: 2025-05-22 08:30:40 +0900

MDRでの公開時刻: 2025-05-22 08:23:05 +0900