Presentation Ultra-High-Resolution Thermometer Based on Diamond MEMS

Wen Zhao (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; Tokuyuki Teraji SAMURAI ORCID (Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group, National Institute for Materials Science) ; Satoshi Koizumi SAMURAI ORCID (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; Yasuo Koide SAMURAI ORCID (Research Center for Electronic and Optical Materials, National Institute for Materials Science) ; Meiyong Liao SAMURAI ORCID (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science)

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Wen Zhao, Tokuyuki Teraji, Satoshi Koizumi, Yasuo Koide, Meiyong Liao. Ultra-High-Resolution Thermometer Based on Diamond MEMS. https://doi.org/10.48505/nims.5494

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(abstract)

In this work, we propose a high-quality (Q) factor micro thermometer based on SCD cantilevers (Fig. 1(a)), which was fabricated by smart-cut method [1]. We use higher-order-modes (HOMs) to have both high resolution and sensitivity for precise detection of subtle temperature variations ranging from 380 K to 6.5K. By operation at HOMs (Fig. 1(b)), the experimental resolution of 10 mK (facility limit) was identified and an estimated resolution of 100 µK and a noise equivalent temperature of 22 nK/Hz1/2 were achieved. The temperature resolution and noise level establish new global benchmarks in temperature sensors among MEMS sensors. This work underscores the versatility and transformative potential of the diamond MEMS resonator as an advanced platform for ultra-high-resolution temperature sensing.

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Keyword: Diamond, MEMS

Conference: The 18th International Conference on New Diamond and Nano Carbons (2025-05-11 - 2025-05-15)

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Manuscript type: Not a journal article

MDR DOI: https://doi.org/10.48505/nims.5494

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Updated at: 2025-05-22 08:30:40 +0900

Published on MDR: 2025-05-22 08:23:05 +0900

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