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説明:

Single-crystal diamond (SCD) is a promising material for high-performance and high-reliability micro-electromechanical system (MEMS) superior to other semiconductor materials (Si, III-nitrides, SiC, etc.,) in terms of the outstanding mechanical strength, thermal conductivity, and chemical inertness. In this chapter, we review our recent progress in diamond MEMS magnetic sensors by integrating a magneto-strictive galfenol (FeGa) thin film on SCD MEMS resona-tors for high-temperature conditions. The magnetic sensing mechanism of magnetic sensors is discussed. The thermal stability of the sensors is analyzed and the strategies to enhance the magnetic sensing performance of the magnetic sensors are described.

権利情報:

• In Copyright
  

キーワード: Diamond, MEMS, magnetic sensors

刊行年月日: 2024-05-22

出版者: Springer

掲載誌:

• Novel Aspects of Diamond II p. 409-443

研究助成金:

原稿種別: 査読前原稿 (Author's original)

MDR DOI: https://doi.org/10.48505/nims.4876

公開URL: https://link.springer.com/chapter/10.1007/978-3-031-47556-6_14

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更新時刻: 2024-10-21 12:30:45 +0900

MDRでの公開時刻: 2024-10-21 12:30:46 +0900