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Single-crystal diamond (SCD) is a promising material for high-performance and high-reliability micro-electromechanical system (MEMS) superior to other semiconductor materials (Si, III-nitrides, SiC, etc.,) in terms of the outstanding mechanical strength, thermal conductivity, and chemical inertness. In this chapter, we review our recent progress in diamond MEMS magnetic sensors by integrating a magneto-strictive galfenol (FeGa) thin film on SCD MEMS resona-tors for high-temperature conditions. The magnetic sensing mechanism of magnetic sensors is discussed. The thermal stability of the sensors is analyzed and the strategies to enhance the magnetic sensing performance of the magnetic sensors are described.

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• In Copyright
  

Keyword: Diamond, MEMS, magnetic sensors

Date published: 2024-05-22

Publisher: Springer

Journal:

• Novel Aspects of Diamond II p. 409-443

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Manuscript type: Author's original (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4876

First published URL: https://link.springer.com/chapter/10.1007/978-3-031-47556-6_14

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Updated at: 2024-10-21 12:30:45 +0900

Published on MDR: 2024-10-21 12:30:46 +0900