Zilong Zhang
(Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
)
;
Meiyong Liao
(Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science)
Collection
Citation
Description:
(abstract)Single-crystal diamond (SCD) is a promising material for high-performance and high-reliability micro-electromechanical system (MEMS) superior to other semiconductor materials (Si, III-nitrides, SiC, etc.,) in terms of the outstanding mechanical strength, thermal conductivity, and chemical inertness. In this chapter, we review our recent progress in diamond MEMS magnetic sensors by integrating a magneto-strictive galfenol (FeGa) thin film on SCD MEMS resona-tors for high-temperature conditions. The magnetic sensing mechanism of magnetic sensors is discussed. The thermal stability of the sensors is analyzed and the strategies to enhance the magnetic sensing performance of the magnetic sensors are described.
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Keyword: Diamond, MEMS, magnetic sensors
Date published: 2024-05-22
Publisher: Springer
Journal:
- Novel Aspects of Diamond II p. 409-443
Funding:
Manuscript type: Author's original (Submitted manuscript)
MDR DOI: https://doi.org/10.48505/nims.4876
First published URL: https://link.springer.com/chapter/10.1007/978-3-031-47556-6_14
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Updated at: 2024-10-21 12:30:45 +0900
Published on MDR: 2024-10-21 12:30:46 +0900
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