ファイル種別: application/pdf キーワード: MEMS
全ての絞り込みを解除

11 件のレコードが見つかりました。 1件目から10件目まで表示します。

全ての絞り込みを解除
2024055940.pdf
High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures
プロシーディングス論文
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Keyun Gu (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Liwen Sang (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Masaya Toda (author) (この著者で検索)
Graduate School of Engineering, Tohoku University
;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Zhaohui Huang (author) (この著者で検索)
China University of Geosciences
;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-10-13 17:16:05 +0900
manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
ジャーナル論文
著者
Kotaro Naruse (author) (この著者で検索)
;
Naru Kato (author) (この著者で検索)
;
Takuma Matsumori (author) (この著者で検索)
;
Jun Shlomi (author) (この著者で検索)
;
Yoshihiro Midoh (author) (この著者で検索)
;
Tetsuya Hirose (author) (この著者で検索)
;
Gaku Imamura (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Genki Yoshikawa (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Constantine Sideris (author) (この著者で検索)
;
Noriyuki Miura (author) (この著者で検索)
キーワード
gas sensor, CMOS, MEMS
刊行年月日
2025-02-16
更新時刻
2025-12-25 16:21:05 +0900
perspective-20241226.pdf
A perspective on diamond MEMS magnetic sensors
ジャーナル論文
著者
ORCID ;
Keyun Gu (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
ORCID ; ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2025-03-01
更新時刻
2025-05-19 16:30:19 +0900
Revised Maunscript (clean version) .pdf
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Zilong Zhang (author) (この著者で検索)
;
Yasuo Koide (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
;
Zhaohui Huang (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2023-07-26
更新時刻
2025-07-26 08:30:34 +0900
041124_1_5.0250902-min.pdf
High-order resonance enhancing the mass sensitivity of diamond cantilevers
ジャーナル論文
著者
Wen Zhao (author) (この著者で検索)
ORCID ;
Guo Chen (author) (この著者で検索)
ORCID ;
Keyun Gu (author) (この著者で検索)
ORCID ;
Masaya Toda (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-04-01
更新時刻
2025-07-12 08:30:35 +0900
2024.2 STAC-D2MatE.pdf
Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching
会議発表ポスター
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Keyun Gu (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Liwen Sang (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Zhaohui Huang (author) (この著者で検索)
China University of Geosciences
;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-11-04 10:30:56 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
ジャーナル論文
著者
ORCID SAMURAI
キーワード
Ga2O3, TMAH, wet etching, MEMS
刊行年月日
2025-11-01
更新時刻
2025-11-27 08:30:13 +0900
SPRING2026 - Abstract 595.pdf
Ultrathin Single-Crystal Diamond NEMS Cantilevers for High-Sensitivity Nanomechanical Sensing
プロシーディングス論文
著者
G. Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
W. Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Z. Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
S. Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
M. Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-10-13 17:00:44 +0900
AFM-resonator_sensor-20230307　.pdf
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
ジャーナル論文
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Wen Zhao (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science
;
Masaya Toda (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Diamond, MEMS, Magnetic sensors
刊行年月日
2023-03-27
更新時刻
2024-07-04 16:30:34 +0900
NDNC2026_abstract.pdf
Ultrathin Diamond NEMS Cantilevers with Enhanced Frequency Stability for High-Sensitivity Mass Sensing
会議発表ポスター
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zhaozong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-10-13 10:07:38 +0900
絞り込み