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In this work, we proposed a smart-cut technique for SCD NEMS fabrication through oxygen etching in high temperatures. These cantilevers’ resonance frequency and length closely follow the law provided by Euler-Bernoulli beam theory at every turn. The etching treatments result in a decrease in the resonance frequency of the diamond cantilevers due to the reduction in thickness. The reduced thickness of the diamond cantilevers can be determined through the resonance frequency. It was noted that there was a marginal reduction in thickness before 600℃, whereas a significant decrease was observed at 685℃. Considering both top and bottom sides of the cantilevers, the average etching rate of diamond is assessed to be approximately 5 nm/h at 685℃ in pure oxygen environment. Following each etching, the surface morphology and crystal quality of diamond were further investigated by atomic force microscopy (AFM), 3D laser scanning microscope, and Raman. This study presents a smart-cut strategy for fabricating diamond NEMS by the atomic-scale etching of SCD cantilevers in an oxygen atmosphere.

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キーワード: Diamond, MEMS

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会議: The International Conference on the Science and Technology for Advanced Ceramics (STAC) 2024 (2024-02-29)

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原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.8695

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更新時刻: 2026-11-04 10:30:56 +0900

MDRでの公開時刻: 2026-11-04 12:31:57 +0900