@misc{chen,
  title = {Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching},
  author = {Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Yasuo Koide, Zhaohui Huang, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}