Download file (268KB)
Download as zip (247KB)

コレクション

引用

説明:

Ultrathin single-crystal diamond (SCD) nanoelectromechanical systems (NEMS) are highly attractive for precision sensing because they combine nanoscale dimensions with exceptional mechanical robustness, low dissipation, and high thermal stability. Here, we investigate the frequency stability and detectable mass limit of a 50-nm-thick, 60-µm-long SCD cantilever fabricated by a smart-cut-assisted thinning strategy, with emphasis on the benefits of the second mode resonance operation.

The ultrathin diamond cantilever maintains high crystalline quality and exhibits resonance behavior consistent with the Euler–Bernoulli beam model, confirming excellent structural integrity at extreme thickness scaling. Frequency fluctuations were measured in a closed-loop tracking configuration with a bandwidth of 1 Hz, and the stability was quantified using Allan deviation. The sampling rate was fixed at 500 Sa/s. Time-domain measurements over 60 s show stable resonance responses for both the fundamental and second mode. As shown in Figure 1, the Allan deviation demonstrates a clear improvement in frequency stability in the second mode, with the minimum value decreases from 4.89 × 10-6 for the fundamental mode to 1.45 × 10-6.

This improved frequency stability directly enhances the detectable mass limit. Based on the mass-sensing relation, the minimum detectable mass improves from 6.16 × 10-19 kg in the fundamental mode to 1.83 × 10-19 kg in the second mode, showing more than a threefold enhancement. The improved frequency stability of the second mode arises from its higher resonance frequency, which reduces the relative impact of thermally induced frequency fluctuations. These results demonstrate that second-order mode operation is an effective route toward unreliable and ultrasensitive diamond NEMS for next-generation nanomechanical sensing.

権利情報:

• In Copyright
  

キーワード: Diamond, MEMS

刊行年月日:

出版者:

掲載誌:

会議: 19th International Conference on New Diamond and Nano Carbons (NDNC 2026) (2026-06-07 - 2026-06-11)

研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.8651

公開URL:

関連資料:

その他の識別子:

連絡先:

更新時刻: 2026-10-13 10:07:38 +0900

MDRでの公開時刻: 2026-10-13 12:33:52 +0900