@misc{chen,
  title = {Ultrathin Diamond NEMS Cantilevers with Enhanced Frequency Stability for High-Sensitivity Mass Sensing},
  author = {Guo Chen, Wen Zhao, Zhaozong Zhang, Satoshi Koizumi, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}