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説明:

Miniaturizing and reducing the power consumption of multi-modal gas sensors with multiple channels can enable a wide array of applications, including integrating with wearable devices for daily breath analysis, encapsulation into ingestible pills for internal body measurements, and embedding into smart tags for food freshness management (Fig. 20.1.1). Traditional gas sensors typically have the transducer and CMOS chip connected via wiring on a substrate, leading to a large-form factor that requires complicated and expensive packaging and cannot readily scale to many-sensor arrays [1]. Recent studies have proposed gas sensors utilizing a MEMS-CMOS stack; however, these have yet to demonstrate responses to different gas types, and there are also challenges regarding increasing the number of channels and reducing the power consumption [2]. In this paper, we propose a heterogeneous multi-modal gas sensor that employs a Membrane-type Surface-stress Sensor (MSS) as the transducer stacked on top of CMOS for analog frontend and digital readout.

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• In Copyright
  © 2025 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

キーワード: gas sensor, CMOS, MEMS

刊行年月日: 2025-02-16

出版者: IEEE

掲載誌:

• Digest of Technical Papers - IEEE International Solid-State Circuits Conference (ISSN: 01936530) vol. 68 p. 348-350

研究助成金:

• JST JPMJKB2307 (世界のトップ研究者ネットワーク参画のための国際研究協力プログラム)

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.6077

公開URL: https://doi.org/10.1109/isscc49661.2025.10904647

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更新時刻: 2025-12-25 16:21:05 +0900

MDRでの公開時刻: 2025-12-26 08:19:21 +0900