Article 20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack

Kotaro Naruse ; Naru Kato ; Takuma Matsumori ; Jun Shlomi ; Yoshihiro Midoh ; Tetsuya Hirose ; Gaku Imamura SAMURAI ORCID (National Institute for Materials Science) ; Genki Yoshikawa SAMURAI ORCID (National Institute for Materials Science) ; Constantine Sideris ; Noriyuki Miura

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Kotaro Naruse, Naru Kato, Takuma Matsumori, Jun Shlomi, Yoshihiro Midoh, Tetsuya Hirose, Gaku Imamura, Genki Yoshikawa, Constantine Sideris, Noriyuki Miura. 20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack. Digest of Technical Papers - IEEE International Solid-State Circuits Conference. 2025, 68 (), 348-350. https://doi.org/10.1109/isscc49661.2025.10904647

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(abstract)

Miniaturizing and reducing the power consumption of multi-modal gas sensors with multiple channels can enable a wide array of applications, including integrating with wearable devices for daily breath analysis, encapsulation into ingestible pills for internal body measurements, and embedding into smart tags for food freshness management (Fig. 20.1.1). Traditional gas sensors typically have the transducer and CMOS chip connected via wiring on a substrate, leading to a large-form factor that requires complicated and expensive packaging and cannot readily scale to many-sensor arrays [1]. Recent studies have proposed gas sensors utilizing a MEMS-CMOS stack; however, these have yet to demonstrate responses to different gas types, and there are also challenges regarding increasing the number of channels and reducing the power consumption [2]. In this paper, we propose a heterogeneous multi-modal gas sensor that employs a Membrane-type Surface-stress Sensor (MSS) as the transducer stacked on top of CMOS for analog frontend and digital readout.

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    © 2025 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Keyword: gas sensor, CMOS, MEMS

Date published: 2025-02-16

Publisher: IEEE

Journal:

  • Digest of Technical Papers - IEEE International Solid-State Circuits Conference (ISSN: 01936530) vol. 68 p. 348-350

Funding:

  • JST JPMJKB2307 (世界のトップ研究者ネットワーク参画のための国際研究協力プログラム)

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.6077

First published URL: https://doi.org/10.1109/isscc49661.2025.10904647

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Updated at: 2025-12-25 16:21:05 +0900

Published on MDR: 2025-12-26 08:19:21 +0900

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