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Ultrathin nanoelectromechanical system (NEMS) resonators are essential for achieving ultimate force and mass sensitivity, yet fabricating mechanically robust devices with nanometer-scale thickness and low dissipation remains a major challenge. In particular, conventional semiconductor materials suffer from enhanced surface-related losses when scaled to the nanoscale, while two-dimensional (2D) materials, despite their atomic thickness, face limitations in reproducibility, controllability, and quality (Q) factors. These challenges motivate the search for an ultrathin NEMS platform that combines nanoscale dimensions with high mechanical stability and scalability.
These results establish ultrathin single-crystal diamond as a highly promising NEMS material platform that bridges the gap between conventional MEMS materials and 2D nanomechanical systems. The demonstrated fabrication strategy and device performance open a viable pathway toward scalable, high-sensitivity, and thermally stable nanomechanical sensors for applications in force spectroscopy, mass detection, and operation in harsh environments.

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キーワード: Diamond, MEMS

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会議: The European Materials Research Society (E-MRS) 2026 Spring Meeting & Exhibit (2026-05-25 - 2026-05-29)

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原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.8656

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更新時刻: 2026-10-13 17:00:44 +0900

MDRでの公開時刻: 2026-10-13 18:28:30 +0900