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MEMS resonators are typically engineered to function at their first vibration mode, and extensive research has been dedicated to understanding and optimizing this fundamental mode. However, despite the demonstrated effectiveness of operating at high modes for achieving high sensitivity in MEMS sensing applications, there is currently no reported research on higher-order modes at high temperatures. This paper reports an investigation on the resonance properties of higher-order vibration modes of single crystal diamond (SCD) MEMS, specifically focusing on their performance at elevated temperatures up to 500°C. It is shown that the second mode of SCD cantilever exhibits a high-quality factor of 9,541 and high thermal stability of frequency less than 10 ppm/°C at 500°C.

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キーワード: Diamond, MEMS

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会議: 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024) (2024-05-02 - 2024-05-05)

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原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.8657

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更新時刻: 2026-10-13 17:16:05 +0900

MDRでの公開時刻: 2026-10-13 18:28:33 +0900