@proceedings{chen,
  title = {High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures},
  author = {Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Yasuo Koide, Zhaohui Huang, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}