Ultrathin Single-Crystal Diamond NEMS Cantilevers for High-Sensitivity Nanomechanical Sensing
- プロシーディングス論文
- 著者
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G. Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
W. Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Z. Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
S. Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
M. Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-10-13 17:00:44 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- ジャーナル論文
- 著者
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Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Masaya Toda (author) (この著者で検索)Yasuo Koide (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-04-01
- 更新時刻
- 2025-07-12 08:30:35 +0900
A membrane, pseudo-vertical p-i-n diamond detector
- ジャーナル論文
- 著者
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;Tetsuichi Kishishita (author) (この著者で検索)Kimiyoshi Ichikawa (author) (この著者で検索)
https://orcid.org/0000-0002-8655-3516
(unauthenticated)
National Institute for Materials Science
;
;Kazuya Tauchi (author) (この著者で検索);Masayoshi Shoji (author) (この著者で検索);Masayuki Hagiwara (author) (この著者で検索)Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science
;
Manobu M. Tanaka (author) (この著者で検索)
- キーワード
- Diamond, Nuclear power plant, alpha particle, gamma ray
- 刊行年月日
- 2023-10-03
- 更新時刻
- 2024-02-07 15:14:37 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- ジャーナル論文
- 著者
-
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science
;
;Wen Zhao (author) (この著者で検索);Guo Chen (author) (この著者で検索)National Institute for Materials Science;Masaya Toda (author) (この著者で検索)Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS, Magnetic sensors
- 刊行年月日
- 2023-03-27
- 更新時刻
- 2024-07-04 16:30:34 +0900
Synergistic Effect of Surface States and Deep Defects for Ultrahigh Gain Deep‐Ultraviolet Photodetector with Low‐Voltage Operation
- ジャーナル論文
- 著者
-
;Keyun Gu (author) (この著者で検索);Kongping Wu (author) (この著者で検索);Zilong Zhang (author) (この著者で検索)Takeo Ohsawa (author) (この著者で検索)
;
;Jian Huang (author) (この著者で検索);Yasuo Koide (author) (この著者で検索);Masaya Toda (author) (この著者で検索)Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, photodetector
- 刊行年月日
- 2024-12-04
- 更新時刻
- 2025-12-04 08:30:33 +0900
Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers
- プロシーディングス論文
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Liwen Sang (author) (この著者で検索)National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-10-13 16:46:48 +0900
Air Damping Effect on Quality-Factor in High-Order Resonance Modes of Single-Crystal Diamond Microcantilevers
- プロシーディングス論文
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Keyun G (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupLiwen Sang (author) (この著者で検索)National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
;Zhaohui Huang (author) (この著者で検索)China University of GeosciencesMeiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-10-13 16:40:16 +0900
A perspective on diamond MEMS magnetic sensors
- ジャーナル論文
- 著者
-
Zilong Zhang (author) (この著者で検索)
;
;Keyun Gu (author) (この著者で検索)Masaya Toda (author) (この著者で検索)
https://orcid.org/0000-0003-3849-6948
(unauthenticated)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS, magnetic sensors
- 刊行年月日
- 2025-03-01
- 更新時刻
- 2025-05-19 16:30:19 +0900
Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching
- 会議発表ポスター
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Keyun Gu (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupLiwen Sang (author) (この著者で検索)National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
;Zhaohui Huang (author) (この著者で検索)China University of GeosciencesMeiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-11-04 10:30:56 +0900
Surface transfer doping of hydrogen-terminated diamond probed by shallow nitrogen-vacancy centers
- ジャーナル論文
- 著者
-
Taisuke Kageura (author) (この著者で検索)
https://orcid.org/0000-0002-9792-5223
(unauthenticated)
National Institute for Materials Science
;
Yosuke Sasama (author) (この著者で検索)National Institute for Materials Science
;
;Keisuke Yamada (author) (この著者で検索);Kosuke Kimura (author) (この著者で検索);Shinobu Onoda (author) (この著者で検索)Yamaguchi Takahide (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, Transfer doping, NV center, Two-dimensional hole gas, Hydrogen-terminated surface
- 刊行年月日
- 2024-07-02
- 更新時刻
- 2024-08-29 16:09:18 +0900