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Here, we fabricated diamond cantilevers 7 and investigated the effect of ambient gas atmosphere on Q-factor in high-order resonance of SCD MEMS cantilevers. The Q-factors of a 120 µm long SCD microcantilever in three different resonance modes (1st, 2nd and 3rd), are plotted as a function of the ambient pressure varied from high vacuum (10-4 Pa) to atmospheric pressure (105 Pa). The inset demonstrates the relative stability of the resonance frequency (f) versus gas pressure for all three modes. The Q-factor of the high order modes is found to be nearly constant up to pressures between 10-4 to 100 Pa and then decreases to less than 1,000 in 103 Pa, similar to the fundamental mode. Compared to the high order modes, the first order mode has higher Q-factor in vacuum (intrinsic regime). Nevertheless, the high-order modes in the molecular and viscous flow regimes (P > 10 Pa) exhibit higher Q-factors than the fundamental mode. Hence, in low-vacuum and atmospheric environments, the high-order resonance modes provide a profound sensitivity improvement for MEMS sensing devices, attributed to the much higher f·Q product.

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キーワード: Diamond, MEMS

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会議: 2024年第71回応用物理学会春季学術講演会 (2024-03-22 - 2024-03-25)

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原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.8652

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更新時刻: 2026-10-13 16:40:16 +0900

MDRでの公開時刻: 2026-10-13 18:28:37 +0900