@proceedings{chen,
  title = {Air Damping Effect on Quality-Factor in High-Order Resonance Modes of Single-Crystal Diamond Microcantilevers},
  author = {Guo Chen, Zilong Zhang, Keyun G, Liwen Sang, Satoshi Koizumi, Yasuo Koide, Zhaohui Huang, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}