Effect of Energy Dissipation in Higher-Order Resonance on SCD MEMS Cantilevers Toward High f·Q
- プロシーディングス論文
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Keyun Gu (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupSatoshi Koizum (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Zhaohui Huang (author) (この著者で検索)China University of GeosciencesMeiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-10-13 16:51:23 +0900
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
- ジャーナル論文
- 著者
-
;Guo Chen (author) (この著者で検索);Zilong Zhang (author) (この著者で検索);Yasuo Koide (author) (この著者で検索);Satoshi Koizumi (author) (この著者で検索);Zhaohui Huang (author) (この著者で検索)Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2023-07-26
- 更新時刻
- 2025-07-26 08:30:34 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- ジャーナル論文
- 著者
-
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Masaya Toda (author) (この著者で検索)Yasuo Koide (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-04-01
- 更新時刻
- 2025-07-12 08:30:35 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- ジャーナル論文
- 著者
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Zilong Zhang (author) (この著者で検索)National Institute for Materials Science
;
;Wen Zhao (author) (この著者で検索);Guo Chen (author) (この著者で検索)National Institute for Materials Science;Masaya Toda (author) (この著者で検索)Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS, Magnetic sensors
- 刊行年月日
- 2023-03-27
- 更新時刻
- 2024-07-04 16:30:34 +0900
A perspective on diamond MEMS magnetic sensors
- ジャーナル論文
- 著者
-
Zilong Zhang (author) (この著者で検索)
;
;Keyun Gu (author) (この著者で検索)Masaya Toda (author) (この著者で検索)
https://orcid.org/0000-0003-3849-6948
(unauthenticated)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS, magnetic sensors
- 刊行年月日
- 2025-03-01
- 更新時刻
- 2025-05-19 16:30:19 +0900
Air Damping Effect on Quality-Factor in High-Order Resonance Modes of Single-Crystal Diamond Microcantilevers
- プロシーディングス論文
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Keyun G (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupLiwen Sang (author) (この著者で検索)National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
;Zhaohui Huang (author) (この著者で検索)China University of GeosciencesMeiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-10-13 16:40:16 +0900
Ultrahigh Responsivity of Diamond-based Solar-blind Photodetectors Using Hydrogen Plasma Treatment
- 会議発表ポスター
- 著者
-
;Keyun Gu (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupZilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Guo Chen (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupLiwen Sang (author) (この著者で検索)National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
;
;Jian Huang (author) (この著者で検索)Shanghai UniversityYasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, photodetector
- 刊行年月日
- 更新時刻
- 2024-05-16 12:30:23 +0900
Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching
- 会議発表ポスター
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Keyun Gu (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupLiwen Sang (author) (この著者で検索)National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
;Zhaohui Huang (author) (この著者で検索)China University of GeosciencesMeiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-11-04 10:30:56 +0900
High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures
- プロシーディングス論文
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Keyun Gu (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupLiwen Sang (author) (この著者で検索)National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
;Masaya Toda (author) (この著者で検索)Graduate School of Engineering, Tohoku UniversityYasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
;Zhaohui Huang (author) (この著者で検索)China University of GeosciencesMeiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-10-13 17:16:05 +0900
Ultrathin Diamond NEMS Cantilevers with Enhanced Frequency Stability for High-Sensitivity Mass Sensing
- 会議発表ポスター
- 著者
-
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2026-10-13 10:07:38 +0900