Download file (451KB)
Download as zip (448KB)

コレクション

引用

説明:

In this work, we investigate the higher-order resonance of SCD MEMS cantilevers with high f·Q value. The resonance frequency and Q factors were measured and analyzed at the first three order vibration modes. Under the 1st order vibration and 2nd order vibration mode, the dependence of the resonance frequency on the SCD cantilever length are depicted in Fig.1. (b, c, d, e). It is clear that for both of the fundamental mode and the higher-order mode, the resonance frequency and the SCD length follow the inverse power law relationship strictly. As shown in Fig.1. (f), it was found that the value of f·Q of the SCD cantilevers significantly increases with the higher-order resonance. The improvement of f·Q is due to the higher-order resonances suffer from less energy dissipation, possibly mainly on defects losses, than the fundamental mode.

権利情報:

• In Copyright
  

キーワード: Diamond, MEMS

刊行年月日:

出版者:

掲載誌:

会議: 2023年第84回応用物理学会秋季学術講演会 (2023-09-19 - 2023-09-23)

研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.8655

公開URL:

関連資料:

その他の識別子:

連絡先:

更新時刻: 2026-10-13 16:51:23 +0900

MDRでの公開時刻: 2026-10-13 18:28:34 +0900