@proceedings{chen,
  title = {Effect of Energy Dissipation in Higher-Order Resonance on  SCD MEMS Cantilevers Toward High f·Q},
  author = {Guo Chen, Zilong Zhang, Keyun Gu, Satoshi Koizum, Zhaohui Huang, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}