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TANUMA, Shigeo
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Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Description/Abstract:
It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:
Auger Depth Profiling Analysis
,
Argon Ion Spot Beam
, and
InP/GaInAsP Multilayer Specimen
Material/Specimen:
InP/GaInAsP Multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
,
HARADA, Tomoko
, and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Calculations of electron inelastic mean free paths.VIII. Data for 15 elemental solids over the 50-2000 eV range
Description/Abstract:
We report calculations of electron inelastic mean free paths (IMFPs) for 50 eV to 2000 eV electrons in 14 elemental solids (Li, Be, diamo...
Keyword:
IMFP
,
Li, Be, diamond, graphite, Na, K, Sc, Ge, In, Sn, Cs, Gd, Tb, Dy, Al
,
TPP-2M equation
,
electron inelastic mean free path
, and
rare-earth elements
Resource Type:
Article
Author:
TANUMA, Shigeo
,
C.J. Powell
, and
D.R. Penn
Journal:
SURFACE AND INTERFACE ANALYSIS
Date Uploaded:
29/05/2023
Date Modified:
30/05/2023
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Description/Abstract:
We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
, and
argon ion sputtering
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting
Description/Abstract:
We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:
Auger depth profiling analysis
,
GaAs/AlAs multilayer
,
non-negative least-square curve fit
, and
peak separation
Material/Specimen:
GaAs/AlAs multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Energy Dependence of Electron Stopping Powers in Elemental Solids over the 100 eV to 30 keV Energy Range
Description/Abstract:
We analyzed the energy dependence of electron stopping powers (SPs) calculated for 41 elemental solids from experimental optical data for...
Keyword:
Electron stopping power
,
Elemental solids
,
Energy dependence
, and
Fano plo
Resource Type:
Article
Author:
KUMAGAI, kazuhiro
,
TANUMA, Shigeo
, and
C.J. Powell
Journal:
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Date Uploaded:
29/05/2023
Calculations of Electron Inelastic Mean Free Paths in Solids over the 10 eV to 200 keV Energy Range with the Relativistic Full Penn Algorithm
Description/Abstract:
We have calculated IMFPs for 41 elemental solids and 30 semiconductors at equal energy intervals on a logarithmic scale corresponding to ...
Keyword:
Fano Plot
,
IMFP
,
Mermin-type ELF
,
relativistic full Penn algorithm
, and
relativistic modified Bethe equation
Resource Type:
Presentation
Author:
Shinotsuka, H
,
TANUMA, Shigeo
,
Powell, C. J.
, and
Penn, D. R.
Date Uploaded:
29/06/2023
Calculations and Measurements of Electron Inelastic Mean Free Paths in Solids
Description/Abstract:
We have calculated IMFPs for 41 elemental solids, 44 inorganic compounds and 12 organic compounds at equal energy intervals on a logarith...
Keyword:
ELF
,
EPES
,
FPA
,
Fano Plot
,
IMFP
, and
Mermin ELF
Resource Type:
Presentation
Author:
TANUMA, Shigeo
Date Uploaded:
29/06/2023
Inelastic Scattering of Electrons in Solids
Description/Abstract:
An overview is given of inelastic electron scattering in solids with an emphasis on calculations and measurements of electron inelastic m...
Keyword:
electrons
,
inelastic mean free path
, and
inelastic scattering
Resource Type:
Book
Author:
TANUMA, Shigeo
and
C. J. Powell
Date Uploaded:
03/02/2023
Electron Inelastic Mean Free Paths in Liquid Water for Energies from10 eV to 10 keV
Description/Abstract:
It is very important to know details of the interactions of low-energy electron with liquid water for many biological applications. There...
Keyword:
IMFP
and
liquid water
Resource Type:
Presentation
Author:
TANUMA, Shigeo
,
SHINOTSUKA, Hiroshi
,
DA, Bo
,
YOSHIKAWA, Hideki
, and
パウエル
Date Uploaded:
29/06/2023
Analysis of electron inelastic scattering in solids over wide energy range and its application to surface chemical analysis
Description/Abstract:
We have, then, calculated IMFPs for 41 elemental solids and 30 semiconductors from 10 eV to 200 keV. These calculations were made with op...
Keyword:
EPES
,
HAXPES
,
IMFP
,
MED
,
electron inelastic scattering
,
energy loss function
, and
relativistic modified Bethe equation
Resource Type:
Presentation
Author:
TANUMA, Shigeo
Date Uploaded:
29/06/2023
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5
Auger depth profiling analysis
3
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InP/GaInAsP multilayer specimens
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English
8
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National Institute for Materials Science
5
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4
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Creative Commons BY-NC Attribution-NonCommercial 4.0 International
7
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Creative Commons BY Attribution 4.0 International
1
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
1
Computational methods
density functional theory or electronic structure
1
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simulations
1
Properties addressed
electrical -- dielectric constant and spectra
1
optical
1
Material/Specimen
InP/GaInAsP multilayer specimens
2
GaAs/AlAs multilayer
1
InP/GaInAsP Multilayer
1
Date created
2021
1
Author
TANUMA, Shigeo
[remove]
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OGIWARA, Toshiya
4
C.J. Powell
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SHINOTSUKA, Hiroshi
2
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Journal of The Surface Science Society of Japan
4
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
1
SURFACE AND INTERFACE ANALYSIS
1
Surface and Interface Analysis
1
e-Journal of Surface Science and Nanotechnology
1