Calculations of Electron Inelastic Mean Free Paths in Solids over the 10 eV to 200 keV Energy Range with the Relativistic Full Penn Algorithm

We have calculated IMFPs for 41 elemental solids and 30 semiconductors at equal energy intervals on a logarithmic scale corresponding to increments of 10% from 10 eV to 200 keV. These calculations were made with optical ELFs using the relativistic full Penn algorithm. Our calculated IMFPs could be fitted to a modified relativistic Bethe equation for inelastic scattering of electron in matter for energies from 50 eV to 200 keV. The RMS deviation in these fits was 0.8% for the 41 elemental solids. The new IMFPs were also compared with IMFPs from the predictive TPP-2M equation that was modified to include relativistic effects; the average RMS deviation in these comparisons was 11.9% for the 41 elemental solids and for energies from 50 eV to 200 keV.