Calculations and Measurements of Electron Inelastic Mean Free Paths in Solids

We have calculated IMFPs for 41 elemental solids, 44 inorganic compounds and 12 organic compounds at equal energy intervals on a logarithmic scale corresponding to increments of 10% from 10 eV to 200 keV. These calculations were made with ELFs using the relativistic full Penn algorithm. The ELFs for semiconductors and several inorganic compounds were obtained from first-principles calculations with the WIEN2K and FEFF codes from 1 eV to 1 MeV. Our calculated IMFPs could be fitted to a modified relativistic Bethe equation for inelastic scattering of electron in matter for energies from 50 eV to 200 keV. The averageRMS deviation in these fits was 0.8% for the 41 elemental solids. The new IMFPs were also compared with IMFPs from the predictive TPP-2M equation.