キーワード: MEMS

24 件のレコードが見つかりました。

3-Abstract-WEN Liao.docx
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
プレゼンテーション
著者
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zhaozong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Satoshi KOIZUMI (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond,, MEMS
刊行年月日
更新時刻
2026-01-09 11:00:08 +0900

abstract Zhang_Liao.docx
Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
プレゼンテーション
著者
Zhaozong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2025-11-06 12:30:27 +0900

30-Manuscript-WEN_2025-Liao 20250114.docx
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
ジャーナル論文
著者
Wen Zhao (author) (この著者で検索)
ORCID ;
Guo Chen (author) (この著者で検索)
ORCID ; ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-07-28
更新時刻
2025-10-28 12:30:23 +0900

4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx
Optical properties of single-crystal diamond MEMS: mitigating substrate interference
ジャーナル論文
著者
Keyun Gu (author) (この著者で検索)
ORCID ;
Zilong Zhang (author) (この著者で検索)
;
Zhaozong Zhang (author) (この著者で検索)
ORCID ;
Jian Huang (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-12-31
更新時刻
2025-10-28 12:30:30 +0900

NDNC2025_abstract_template -WEN_Finalized Zhao_Liao.docx
Ultra-High-Resolution Thermometer Based on Diamond MEMS
プレゼンテーション
著者
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Tokuyuki Teraji (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group
ORCID SAMURAI ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2025-05-22 08:30:40 +0900

Revised Maunscript (clean version) .pdf
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Zilong Zhang (author) (この著者で検索)
;
Yasuo Koide (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
;
Zhaohui Huang (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2023-07-26
更新時刻
2025-07-26 08:30:34 +0900

Maunscript (Clean).docx
Low-Energy Dissipation Diamond MEMS
ジャーナル論文
著者
Guo Chen (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2024-09-27
更新時刻
2025-07-29 08:30:21 +0900

AFM-resonator_sensor-20230307 .pdf
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
ジャーナル論文
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Wen Zhao (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science
;
Masaya Toda (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
ORCID SAMURAI
キーワード
Diamond, MEMS, Magnetic sensors
刊行年月日
2023-03-27
更新時刻
2024-07-04 16:30:34 +0900

Abstract Oxygen-termination effect R.doc
Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS
プレゼンテーション
著者
Keyun Gu (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Jian Huang (author) (この著者で検索)
China University of Geosciences
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
ダイヤモンド, MEMS
刊行年月日
更新時刻
2025-04-12 08:30:28 +0900

perspective-20241226.pdf
A perspective on diamond MEMS magnetic sensors
ジャーナル論文
著者
ORCID ;
Keyun Gu (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
ORCID ; ORCID SAMURAI
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2025-03-01
更新時刻
2025-05-19 16:30:19 +0900