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論文・データセット
コレクション
MDR lattice thermal conductivity calculation database(2)
MDR XAFS DB(1)
資源タイプ
ジャーナル論文(18)
データセット(3)
書籍(1)
キーワード
Ga2O3 (22)
HVPE (3)
Lattice thermal conductivity (2)
TMAH (2)
dislocation (2)
(-102) (1)
(011) (1)
AFM (1)
Aichi SR (1)
BL5S1 (1)
(more)
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試料の化学組成
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試料の構造的特徴
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キーワード: Ga2O3
全ての絞り込みを解除
22 件のレコードが見つかりました。
Using selective-area growth and selective-area etching on (−102) β-Ga2O3 substrates to fabricate plasma-damage-free vertical fins and trenches
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
(-102)
,
selective area growth
,
selective area etching
刊行年月日
2024-01-22
更新時刻
2025-01-25 12:30:12 +0900
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
etching
,
HCl
刊行年月日
2023-04-17
更新時刻
2024-05-29 08:30:12 +0900
First-principles lattice thermal conductivity calculation for Ga2O3 / C2/m (12) / materials id 886
データセット
コレクション
MDR lattice thermal conductivity calculation database
著者
Atsushi Togo
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8393-9766
National Institute for Materials Science Center for Basic Research on Materials
NIMS Researchers Directory SAMURAI
Atsushi Togo
キーワード
Lattice thermal conductivity
,
Ga2O3
刊行年月日
更新時刻
2026-01-24 14:36:41 +0900
High Schottky barrier formation in tilted-dipole PdCoO2/
β
-Ga2O3 (001) interfaces
ジャーナル論文
著者
Takayuki Harada
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8657-2258
NIMS Researchers Directory SAMURAI
Takayuki Harada
;
Takuro Nagai
(author) (
この著者で検索
)
https://orcid.org/0000-0001-5239-3334
NIMS Researchers Directory SAMURAI
Takuro Nagai
;
Kohei Sasaki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8923-7703
(unauthenticated)
Kohei Sasaki
キーワード
Thin film
,
Ga2O3
,
Delafossite
,
Power devices
,
Schottky
刊行年月日
2026-06-01
更新時刻
2026-06-10 14:51:59 +0900
First-principles lattice thermal conductivity calculation for Ga2O3 / R-3c (167) / materials id 1243
データセット
コレクション
MDR lattice thermal conductivity calculation database
著者
Atsushi Togo
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8393-9766
National Institute for Materials Science Center for Basic Research on Materials
NIMS Researchers Directory SAMURAI
Atsushi Togo
キーワード
Lattice thermal conductivity
,
Ga2O3
刊行年月日
更新時刻
2026-01-24 12:32:36 +0900
Halide vapor phase epitaxy of a thick
c
-plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
ジャーナル論文
著者
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shiyu Xiao
(author) (
この著者で検索
)
https://orcid.org/0009-0007-0382-0396
(unauthenticated)
Shiyu Xiao
;
Kazuto Murakami
(author) (
この著者で検索
)
Kazuto Murakami
;
Katsuhiro Imai
(author) (
この著者で検索
)
Katsuhiro Imai
;
Takahiro Tomita
(author) (
この著者で検索
)
Takahiro Tomita
キーワード
Ga2O3
,
HVPE
,
Cr2O3
刊行年月日
2026-02-21
更新時刻
2026-02-18 16:30:15 +0900
Plasma-free anisotropic selective-area etching of β-Ga
2
O
3
using forming gas under atmospheric pressure
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Rie Togashi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-9467-0755
(unauthenticated)
Rie Togashi
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
forming gas
,
anisotropic etching
,
plasma-free process
刊行年月日
2024-12-31
更新時刻
2024-07-31 12:30:20 +0900
Epitaxial relationship of NiO on (-102) β-Ga2O3
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shinji Nakagomi
(author) (
この著者で検索
)
Ishinomaki Senshu University Faculty of Science and Engineering
Shinji Nakagomi
キーワード
Ga2O3
,
NiO
,
epitaxial relationship
刊行年月日
2023-12-01
更新時刻
2024-11-23 16:30:35 +0900
Fabrication of
β
-Ga
2
O
3
/air-gap structures on (010)
β
-Ga
2
O
3
by wet etching in tetramethylammonium hydroxide (TMAH)
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
TMAH
,
wet etching
,
MEMS
刊行年月日
2025-11-01
更新時刻
2025-11-27 08:30:13 +0900
Step-and-terrace surface formation on (001)
β
-Ga
2
O
3
by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
TMAH
,
Wet etching
刊行年月日
2025-08-01
更新時刻
2025-08-18 16:30:36 +0900
キーワード
Ga2O3
(22)
HVPE
(3)
Lattice thermal conductivity
(2)
TMAH
(2)
dislocation
(2)
(-102)
(1)
(011)
(1)
AFM
(1)
Aichi SR
(1)
BL5S1
(1)
Cr2O3
(1)
Delafossite
(1)
ELO
(1)
Ga K-edge
(1)
Gallium(III) Oxide
(1)
HCl
(1)
MEMS
(1)
NiO
(1)
Oxide
(1)
Power devices
(1)
Schottky
(1)
Si(111)
(1)
Superlattice
(1)
TEM
(1)
Thin film
(1)
Transistor
(1)
Wet etching
(1)
XAFS
(1)
anisotropic etching
(1)
b-Ga2O3
(1)
collection - MDR XAFS DB
(1)
dopant
(1)
epitaxial relationship
(1)
epitaxy
(1)
etching
(1)
fcc
(1)
forming gas
(1)
plasma-free process
(1)
power device
(1)
selective area etching
(1)
selective area growth
(1)
wet etching
(1)
κ-Ga2O3
(1)
RDEメタデータ定義
RDE送り状
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