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論文・データセット
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ジャーナル論文(18)
書籍(1)
キーワード
Ga2O3 (19)
HVPE (3)
TMAH (2)
dislocation (2)
(-102) (1)
Cr2O3 (1)
Delafossite (1)
ELO (1)
HCl (1)
HCl gas etching (1)
(more)
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Creative Commons BY Attribution 4.0 International (8)
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キーワード: Ga2O3
全ての絞り込みを解除
19 件のレコードが見つかりました。
Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
HCl gas etching
刊行年月日
2023-06-01
更新時刻
2024-06-15 08:30:13 +0900
Comparative Study of the Optical Properties of α‐, β‐, and κ‐Ga
2
O
3
ジャーナル論文
著者
Lewis T. Penman
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0147-9995
(unauthenticated)
Lewis T. Penman
;
Zak M. Johnston
(author) (
この著者で検索
)
Zak M. Johnston
;
Paul R. Edwards
(author) (
この著者で検索
)
https://orcid.org/0000-0001-7671-7698
(unauthenticated)
Paul R. Edwards
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Clifford McAleese
(author) (
この著者で検索
)
Clifford McAleese
;
Piero Mazzolini
(author) (
この著者で検索
)
https://orcid.org/0000-0003-2092-5265
(unauthenticated)
Piero Mazzolini
;
Matteo Bosi
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8992-0249
(unauthenticated)
Matteo Bosi
;
Luca Seravalli
(author) (
この著者で検索
)
https://orcid.org/0000-0003-2784-1785
(unauthenticated)
Luca Seravalli
;
Roberto Fornari
(author) (
この著者で検索
)
Roberto Fornari
;
Robert W. Martin
(author) (
この著者で検索
)
https://orcid.org/0000-0002-6119-764X
(unauthenticated)
Robert W. Martin
;
Fabien C.‐P. Massabuau
(author) (
この著者で検索
)
https://orcid.org/0000-0003-1008-1652
(unauthenticated)
Fabien C.‐P. Massabuau
キーワード
Ga2O3
刊行年月日
2025-02-12
更新時刻
2025-08-18 16:30:52 +0900
Plasma-free anisotropic selective-area etching of β-Ga
2
O
3
using forming gas under atmospheric pressure
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Rie Togashi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-9467-0755
(unauthenticated)
Rie Togashi
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
forming gas
,
anisotropic etching
,
plasma-free process
刊行年月日
2024-12-31
更新時刻
2024-07-31 12:30:20 +0900
Luminescence properties of dislocations in α-Ga
2
O
3
ジャーナル論文
著者
Mugove Maruzane
(author) (
この著者で検索
)
https://orcid.org/0009-0004-9207-0424
(unauthenticated)
Mugove Maruzane
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Olha Makydonska
(author) (
この著者で検索
)
https://orcid.org/0009-0008-5562-2137
(unauthenticated)
Olha Makydonska
;
Paul R Edwards
(author) (
この著者で検索
)
https://orcid.org/0000-0001-7671-7698
(unauthenticated)
Paul R Edwards
;
Robert W Martin
(author) (
この著者で検索
)
https://orcid.org/0000-0002-6119-764X
(unauthenticated)
Robert W Martin
;
Fabien C-P Massabuau
(author) (
この著者で検索
)
https://orcid.org/0000-0003-1008-1652
(unauthenticated)
Fabien C-P Massabuau
キーワード
Ga2O3
,
dislocation
刊行年月日
2025-01-20
更新時刻
2024-11-13 08:31:40 +0900
Using selective-area growth and selective-area etching on (−102) β-Ga2O3 substrates to fabricate plasma-damage-free vertical fins and trenches
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
(-102)
,
selective area growth
,
selective area etching
刊行年月日
2024-01-22
更新時刻
2025-01-25 12:30:12 +0900
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
ジャーナル論文
著者
Yuji Kato
(author) (
この著者で検索
)
Yuji Kato
;
Masataka Imura
(author) (
この著者で検索
)
https://orcid.org/0000-0002-4236-9549
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masataka Imura
;
Yoshiko Nakayama
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7607-6779
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshiko Nakayama
;
Masaki Takeguchi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0282-6020
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masaki Takeguchi
;
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
Superlattice
刊行年月日
2019-06-01
更新時刻
2024-01-05 22:11:34 +0900
High Schottky barrier formation in tilted-dipole PdCoO2/
β
-Ga2O3 (001) interfaces
ジャーナル論文
著者
Takayuki Harada
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8657-2258
NIMS Researchers Directory SAMURAI
Takayuki Harada
;
Takuro Nagai
(author) (
この著者で検索
)
https://orcid.org/0000-0001-5239-3334
NIMS Researchers Directory SAMURAI
Takuro Nagai
;
Kohei Sasaki
(author) (
この著者で検索
)
https://orcid.org/0000-0002-8923-7703
(unauthenticated)
Kohei Sasaki
キーワード
Thin film
,
Ga2O3
,
Delafossite
,
Power devices
,
Schottky
刊行年月日
2026-06-01
更新時刻
2026-06-10 14:51:59 +0900
Fabrication of
β
-Ga
2
O
3
/air-gap structures on (010)
β
-Ga
2
O
3
by wet etching in tetramethylammonium hydroxide (TMAH)
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
TMAH
,
wet etching
,
MEMS
刊行年月日
2025-11-01
更新時刻
2025-11-27 08:30:13 +0900
Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows
ジャーナル論文
著者
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takashi Shinohe
(author) (
この著者で検索
)
FLOSFIA INC.
Takashi Shinohe
キーワード
Ga2O3
,
dislocation
,
HVPE
,
ELO
刊行年月日
2025-05-19
更新時刻
2025-05-21 16:30:09 +0900
Epitaxial relationship of NiO on (-102) β-Ga2O3
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science Research Center for Electronic and Optical Materials
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Shinji Nakagomi
(author) (
この著者で検索
)
Ishinomaki Senshu University Faculty of Science and Engineering
Shinji Nakagomi
キーワード
Ga2O3
,
NiO
,
epitaxial relationship
刊行年月日
2023-12-01
更新時刻
2024-11-23 16:30:35 +0900
キーワード
Ga2O3
(19)
HVPE
(3)
TMAH
(2)
dislocation
(2)
(-102)
(1)
Cr2O3
(1)
Delafossite
(1)
ELO
(1)
HCl
(1)
HCl gas etching
(1)
MEMS
(1)
NiO
(1)
Power devices
(1)
Schottky
(1)
Superlattice
(1)
Thin film
(1)
Transistor
(1)
Wet etching
(1)
anisotropic etching
(1)
b-Ga2O3
(1)
dopant
(1)
epitaxial relationship
(1)
epitaxy
(1)
etching
(1)
fcc
(1)
forming gas
(1)
plasma-free process
(1)
power device
(1)
selective area etching
(1)
selective area growth
(1)
wet etching
(1)
κ-Ga2O3
(1)
RDEメタデータ定義
RDE送り状
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1
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