20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- ジャーナル論文
- 著者
-
;Kotaro Naruse (author) (この著者で検索);Naru Kato (author) (この著者で検索);Takuma Matsumori (author) (この著者で検索);Jun Shlomi (author) (この著者で検索);Yoshihiro Midoh (author) (この著者で検索);Tetsuya Hirose (author) (この著者で検索)Gaku Imamura (author) (この著者で検索)National Institute for Materials Science
;
Genki Yoshikawa (author) (この著者で検索)National Institute for Materials Science
;
;Constantine Sideris (author) (この著者で検索)Noriyuki Miura (author) (この著者で検索) - キーワード
- gas sensor, CMOS, MEMS
- 刊行年月日
- 2025-02-16
- 更新時刻
- 2025-12-25 16:21:05 +0900
High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry
- プレゼンテーション
- 著者
-
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zhaozong Zhang (author) (この著者で検索)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Satoshi KOIZUMI (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond,, MEMS
- 刊行年月日
- 更新時刻
- 2026-01-09 11:00:08 +0900
High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method
- 会議発表ポスター
- 著者
-
;Guo Chen (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group;Wen Zhao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group;Keyun Gu (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupSatoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-05-22 08:30:08 +0900
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
- ジャーナル論文
- 著者
-
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Tokuyuki Teraji (author) (この著者で検索)
;
;Yasuo Koide (author) (この著者で検索);Masaya Toda (author) (この著者で検索)Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-07-28
- 更新時刻
- 2025-10-28 12:30:23 +0900
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
- 雑誌
- コレクション
- Research Highlights
- 著者
-
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (この著者で検索)National Institute for Materials Science
- キーワード
- GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
- 刊行年月日
- 2021-07-13
- 更新時刻
- 2023-12-26 21:38:08 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- ジャーナル論文
- 著者
-
Wen Zhao (author) (この著者で検索)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (この著者で検索)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Keyun Gu (author) (この著者で検索)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
;Masaya Toda (author) (この著者で検索)Yasuo Koide (author) (この著者で検索)
;
Meiyong Liao (author) (この著者で検索)
- キーワード
- Diamond, MEMS
- 刊行年月日
- 2025-04-01
- 更新時刻
- 2025-07-12 08:30:35 +0900
Ultra-High-Resolution Thermometer Based on Diamond MEMS
- プレゼンテーション
- 著者
-
;Wen Zhao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors GroupTokuyuki Teraji (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Optical Materials Field/Semiconductor Defect Design Group
;
Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS
- 刊行年月日
- 更新時刻
- 2025-05-22 08:30:40 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- ジャーナル論文
- 著者
-
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science
;
;Wen Zhao (author) (この著者で検索);Guo Chen (author) (この著者で検索)National Institute for Materials Science;Masaya Toda (author) (この著者で検索)Satoshi Koizumi (author) (この著者で検索)National Institute for Materials Science
;
Yasuo Koide (author) (この著者で検索)National Institute for Materials Science
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science
- キーワード
- Diamond, MEMS, Magnetic sensors
- 刊行年月日
- 2023-03-27
- 更新時刻
- 2024-07-04 16:30:34 +0900
Single-Crystal Diamond MEMS Magnetic Sensor
- 書籍
- 著者
-
Zilong Zhang (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Meiyong Liao (author) (この著者で検索)National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
- キーワード
- Diamond, MEMS, magnetic sensors
- 刊行年月日
- 2024-05-22
- 更新時刻
- 2024-10-21 12:30:45 +0900