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論文・データセット
コレクション
MDR lattice thermal conductivity calculation database(2)
Thermophysical Property Original Datasets(1)
資源タイプ
ジャーナル論文(32)
データセット(3)
書籍(1)
キーワード
Ga2O3 (36)
HVPE (6)
TMAH (4)
HCl gas etching (3)
dislocation (3)
(011) (2)
ELO (2)
Lattice thermal conductivity (2)
Superlattice (2)
selective area growth (2)
(more)
ライセンス
Creative Commons BY Attribution 4.0 International (21)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (7)
In Copyright (7)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
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application/pdf (26)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (8)
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text/x-log (2)
text/plain (1)
試料の化学組成
Ga2O3 (1)
計測法
動的機械的分析 (1)
試料の構造的特徴
溶融 (1)
装置名
ISS-ELF (1)
キーワード: Ga2O3
全ての絞り込みを解除
36 件のレコードが見つかりました。 1件目から10件目まで表示します。
全ての絞り込みを解除
Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
HCl gas etching
刊行年月日
2023-06-01
更新時刻
2024-06-15 08:30:13 +0900
Comparative Study of the Optical Properties of α‐, β‐, and κ‐Ga
2
O
3
ジャーナル論文
著者
Lewis T. Penman
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0147-9995
(unauthenticated)
Lewis T. Penman
;
Zak M. Johnston
(author) (
この著者で検索
)
Zak M. Johnston
;
Paul R. Edwards
(author) (
この著者で検索
)
https://orcid.org/0000-0001-7671-7698
(unauthenticated)
Paul R. Edwards
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Clifford McAleese
(author) (
この著者で検索
)
Clifford McAleese
;
Piero Mazzolini
(author) (
この著者で検索
)
https://orcid.org/0000-0003-2092-5265
(unauthenticated)
Piero Mazzolini
;
Matteo Bosi
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8992-0249
(unauthenticated)
Matteo Bosi
;
Luca Seravalli
(author) (
この著者で検索
)
https://orcid.org/0000-0003-2784-1785
(unauthenticated)
Luca Seravalli
;
Roberto Fornari
(author) (
この著者で検索
)
Roberto Fornari
;
Robert W. Martin
(author) (
この著者で検索
)
https://orcid.org/0000-0002-6119-764X
(unauthenticated)
Robert W. Martin
;
Fabien C.‐P. Massabuau
(author) (
この著者で検索
)
https://orcid.org/0000-0003-1008-1652
(unauthenticated)
Fabien C.‐P. Massabuau
キーワード
Ga2O3
刊行年月日
2025-02-12
更新時刻
2025-08-18 16:30:52 +0900
Luminescence properties of dislocations in α-Ga
2
O
3
ジャーナル論文
著者
Mugove Maruzane
(author) (
この著者で検索
)
https://orcid.org/0009-0004-9207-0424
(unauthenticated)
Mugove Maruzane
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Olha Makydonska
(author) (
この著者で検索
)
https://orcid.org/0009-0008-5562-2137
(unauthenticated)
Olha Makydonska
;
Paul R Edwards
(author) (
この著者で検索
)
https://orcid.org/0000-0001-7671-7698
(unauthenticated)
Paul R Edwards
;
Robert W Martin
(author) (
この著者で検索
)
https://orcid.org/0000-0002-6119-764X
(unauthenticated)
Robert W Martin
;
Fabien C-P Massabuau
(author) (
この著者で検索
)
https://orcid.org/0000-0003-1008-1652
(unauthenticated)
Fabien C-P Massabuau
キーワード
Ga2O3
,
dislocation
刊行年月日
2025-01-20
更新時刻
2024-11-13 08:31:40 +0900
Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows
ジャーナル論文
著者
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takashi Shinohe
(author) (
この著者で検索
)
FLOSFIA INC.
Takashi Shinohe
キーワード
Ga2O3
,
dislocation
,
HVPE
,
ELO
刊行年月日
2025-05-19
更新時刻
2025-05-21 16:30:09 +0900
Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
TMAH
刊行年月日
2026-02-01
更新時刻
2026-02-25 12:30:03 +0900
Photoelectron Holographic Study of Atomic Structure of Si Dopants for Si-doped κ-Ga
2
O
3
(001)
ジャーナル論文
著者
Yoshiyuki YAMASHITA
(author) (
この著者で検索
)
Yoshiyuki YAMASHITA
;
Yuhua TSAI
(author) (
この著者で検索
)
Yuhua TSAI
;
Yusuke HASHIMOTO
(author) (
この著者で検索
)
Yusuke HASHIMOTO
;
Tomohiro MATSUSHITA
(author) (
この著者で検索
)
Tomohiro MATSUSHITA
;
Piero MAZZOLINI
(author) (
この著者で検索
)
Piero MAZZOLINI
キーワード
Photoelectron Holography
,
Ga2O3
,
dopant
刊行年月日
2026-07-10
更新時刻
2026-08-05 15:56:53 +0900
Plasma-free anisotropic selective-area etching of β-Ga
2
O
3
using forming gas under atmospheric pressure
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Rie Togashi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-9467-0755
(unauthenticated)
Rie Togashi
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
forming gas
,
anisotropic etching
,
plasma-free process
刊行年月日
2024-12-31
更新時刻
2024-07-31 12:30:20 +0900
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
ジャーナル論文
著者
Yuji Kato
(author) (
この著者で検索
)
Yuji Kato
;
Masataka Imura
(author) (
この著者で検索
)
https://orcid.org/0000-0002-4236-9549
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masataka Imura
;
Yoshiko Nakayama
(author) (
この著者で検索
)
https://orcid.org/0000-0002-7607-6779
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yoshiko Nakayama
;
Masaki Takeguchi
(author) (
この著者で検索
)
https://orcid.org/0000-0002-0282-6020
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Masaki Takeguchi
;
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
キーワード
Ga2O3
,
Superlattice
刊行年月日
2019-06-01
更新時刻
2024-01-05 22:11:34 +0900
Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas
ジャーナル論文
著者
Takayoshi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8550-9735
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Yuichi Oshima
キーワード
Ga2O3
,
etching
,
HCl
刊行年月日
2023-04-17
更新時刻
2024-05-29 08:30:12 +0900
Epitaxial lateral overgrowth of
m
-plane α-Ga
2
O
3
by halide vapor phase epitaxy
ジャーナル論文
著者
Yuichi Oshima
(author) (
この著者で検索
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
;
Takashi Shinohe
(author) (
この著者で検索
)
https://orcid.org/0009-0000-5559-1432
(unauthenticated)
Takashi Shinohe
キーワード
Ga2O3
,
dislocation
,
ELO
,
HVPE
刊行年月日
2025-12-31
更新時刻
2025-04-23 12:30:12 +0900
キーワード
Ga2O3
(36)
HVPE
(6)
TMAH
(4)
HCl gas etching
(3)
dislocation
(3)
(011)
(2)
ELO
(2)
Lattice thermal conductivity
(2)
Superlattice
(2)
selective area growth
(2)
wet etching
(2)
(-102)
(1)
(−112)
(1)
AFM
(1)
Al2O3
(1)
Bandgap engineering
(1)
Ceramic
(1)
Cr2O3
(1)
Delafossite
(1)
Density
(1)
Electrostatic Levitation
(1)
HCl
(1)
ISS-ELF
(1)
MEMS
(1)
NiO
(1)
Photoelectron Holography
(1)
Power devices
(1)
Schottky
(1)
TEM
(1)
Thin film
(1)
Ti/Pt/Au
(1)
Transistor
(1)
Wet etching
(1)
Wide bandgap
(1)
air bridge
(1)
anisotropic etching
(1)
atomic layer deposition
(1)
collection - Thermophys Datasets
(1)
crystallographic etching
(1)
dopant
(1)
dummy-SiO2
(1)
epitaxial relationship
(1)
etching
(1)
fcc
(1)
forming gas
(1)
lithography
(1)
ohmic contact
(1)
plasma-free process
(1)
positive bias stress
(1)
selective area etching
(1)
RDEメタデータ定義
RDE送り状
<
1
2
3
4
>
絞り込み
コレクション
MDR lattice thermal conductivity calculation database(2)
Thermophysical Property Original Datasets(1)
資源タイプ
ジャーナル論文(32)
データセット(3)
書籍(1)
キーワード
Ga2O3 (36)
HVPE (6)
TMAH (4)
HCl gas etching (3)
dislocation (3)
(011) (2)
ELO (2)
Lattice thermal conductivity (2)
Superlattice (2)
selective area growth (2)
(more)
ライセンス
Creative Commons BY Attribution 4.0 International (21)
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International (7)
In Copyright (7)
Creative Commons BY-NC Attribution-NonCommercial 4.0 International (1)
ファイル種別
application/pdf (26)
application/vnd.openxmlformats-officedocument.wordprocessingml.document (8)
application/x-xz (2)
application/zip (2)
image/png (2)
text/x-log (2)
text/plain (1)
試料の化学組成
Ga2O3 (1)
計測法
動的機械的分析 (1)
試料の構造的特徴
溶融 (1)
装置名
ISS-ELF (1)