Revealing the Surface Adsorbates of Diamond Using MEMS Resonators
- Conference poster
- Creator
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;Keyun Gu (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials ScienceZilong Zhang (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
;Wen Zhao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science;Guo Chen (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials ScienceYasuo Koide (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group, National Institute for Materials Science
;
Satoshi Koizumi (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-05-22 08:30:23 +0900
Surface desorption properties of hydrogen-terminated diamond detected by micromechanical resonator
- Journal article
- Creator
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Keyun Gu (author) (Search by this author)
https://orcid.org/0000-0002-7505-7744
(unauthenticated)
;
Zilong Zhang (author) (Search by this author)
;
Jian Huang (author) (Search by this author)
https://orcid.org/0000-0002-1268-8899
(unauthenticated)
;
Yasuo Koide (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, surface conductivity, MEMS
- Date published
- 2025-06-02
- Updated at
- 2025-07-14 12:30:29 +0900
Low-Energy Dissipation Diamond MEMS
- Journal article
- Creator
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;Guo Chen (author) (Search by this author)Satoshi Koizumi (author) (Search by this author)National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- 2024-09-27
- Updated at
- 2025-07-29 08:30:21 +0900
A perspective on diamond MEMS magnetic sensors
- Journal article
- Creator
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Zilong Zhang (author) (Search by this author)
;
;Keyun Gu (author) (Search by this author)Masaya Toda (author) (Search by this author)
https://orcid.org/0000-0003-3849-6948
(unauthenticated)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-03-01
- Updated at
- 2025-05-19 16:30:19 +0900
Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications
- Conference presentation
- Creator
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Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Satoshi KOIZUMI (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- Updated at
- 2025-11-06 12:30:32 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- Journal article
- Creator
-
Zilong Zhang (author) (Search by this author)National Institute for Materials Science
;
;Wen Zhao (author) (Search by this author);Guo Chen (author) (Search by this author)National Institute for Materials Science;Masaya Toda (author) (Search by this author)Satoshi Koizumi (author) (Search by this author)National Institute for Materials Science
;
Yasuo Koide (author) (Search by this author)National Institute for Materials Science
;
Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS, Magnetic sensors
- Date published
- 2023-03-27
- Updated at
- 2024-07-04 16:30:34 +0900
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
- Keyword
- Ga2O3, TMAH, wet etching, MEMS
- Date published
- 2025-11-01
- Updated at
- 2025-11-27 08:30:13 +0900
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
- Journal article
- Creator
-
Takayoshi Oshima (author) (Search by this author)
;
Yuichi Oshima (author) (Search by this author)
- Keyword
- β-Ga2O3, cantilever, air bridge, MEMS
- Date published
- 2025-12-31
- Updated at
- 2025-09-04 12:30:25 +0900
Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators
- Journal article
- Creator
-
Wen Zhao (author) (Search by this author)
https://orcid.org/0000-0001-8159-8195
(unauthenticated)
;
Guo Chen (author) (Search by this author)
https://orcid.org/0009-0004-9263-5616
(unauthenticated)
;
Tokuyuki Teraji (author) (Search by this author)
;
;Yasuo Koide (author) (Search by this author);Masaya Toda (author) (Search by this author)Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-07-28
- Updated at
- 2025-10-28 12:30:23 +0900
Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation
- Journal article
- Creator
-
;Wen Zhao (author) (Search by this author);Guo Chen (author) (Search by this author)Zhaozong Zhang (author) (Search by this author)
https://orcid.org/0009-0003-8745-4469
(unauthenticated)
;
Satoshi Koizumi (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2025-06-26
- Updated at
- 2025-07-11 16:30:21 +0900