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説明:

Enhancing the resonance stability of microelectromechanical systems (MEMS) resonator is critically important for achieving high-resolution performance in advanced sensing applications. Higher-order mode resonance yields a greater product of resonance frequency and quality factor, thereby enabling high-speed sensing. In this work, we show that higher-order-modes actuation enhances the frequency stability of single-crystal diamond MEMS cantilever resonator. This approach offers a promising strategy to develop highly precise MEMS sensors.

権利情報:

• In Copyright
  

キーワード: Diamond, MEMS

刊行年月日: 2025-06-26

出版者: Elsevier BV

掲載誌:

• Diamond and Related Materials (ISSN: 09259635) vol. 157 112592

研究助成金:

原稿種別: 査読前原稿 (Author's original)

MDR DOI: https://doi.org/10.48505/nims.5582

公開URL: https://doi.org/10.1016/j.diamond.2025.112592

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更新時刻: 2025-07-11 16:30:21 +0900

MDRでの公開時刻: 2025-07-11 16:17:21 +0900