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Description:

Enhancing the resonance stability of microelectromechanical systems (MEMS) resonator is critically important for achieving high-resolution performance in advanced sensing applications. Higher-order mode resonance yields a greater product of resonance frequency and quality factor, thereby enabling high-speed sensing. In this work, we show that higher-order-modes actuation enhances the frequency stability of single-crystal diamond MEMS cantilever resonator. This approach offers a promising strategy to develop highly precise MEMS sensors.

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• In Copyright
  

Keyword: Diamond, MEMS

Date published: 2025-06-26

Publisher: Elsevier BV

Journal:

• Diamond and Related Materials (ISSN: 09259635) vol. 157 112592

Funding:

Manuscript type: Author's version (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.5582

First published URL: https://doi.org/10.1016/j.diamond.2025.112592

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Updated at: 2025-07-11 16:30:21 +0900

Published on MDR: 2025-07-11 16:17:21 +0900