7 records found.
Near-vertical plasma-free HCl gas etching on (011) β-Ga2O3
- Article
- Creator
-
Takayoshi Oshima
;
Yuichi Oshima
- Keyword
- Ga2O3, crystallographic etching, (011)
- Date published
- 2025-01-01
- Updated at
- 2026-01-24 15:43:35 +0900
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
- Article
- Creator
-
Yuji Kato
;
Masataka Imura
;
Yoshiko Nakayama
;
Masaki Takeguchi
;
Takayoshi Oshima
- Keyword
- Ga2O3, Superlattice
- Date published
- 2019-06-01
- Updated at
- 2024-01-05 22:11:34 +0900
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
- Article
- Creator
-
Takayoshi Oshima
;
Yuji Kato
;
Masataka Imura
;
Yoshiko Nakayama
;
Masaki Takeguchi
- Keyword
- Ga2O3, Superlattice
- Date published
- 2018-06-01
- Updated at
- 2024-01-05 22:12:13 +0900
Epitaxial relationship of NiO on (-102) β-Ga2O3
- Article
- Creator
-
Takayoshi Oshima
;
Shinji Nakagomi
- Keyword
- Ga2O3, NiO, epitaxial relationship
- Date published
- 2023-12-01
- Updated at
- 2024-11-23 16:30:35 +0900
Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate
- Article
- Creator
-
Takayoshi Oshima
;
Yuichi Oshima
- Keyword
- Ga2O3, HCl gas etching
- Date published
- 2023-06-01
- Updated at
- 2024-06-15 08:30:13 +0900
Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy
- Article
- Creator
-
Takayoshi Oshima
;
Yuichi Oshima
- Keyword
- Ga2O3, selective area growth
- Date published
- 2022-07-01
- Updated at
- 2024-01-05 22:13:27 +0900
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography
- Article
- Creator
-
Takayoshi Oshima
- Keyword
- Ga2O3, lithography
- Date published
- 2023-01-01
- Updated at
- 2024-01-24 11:20:15 +0900