ファイル種別: application/pdf キーワード: MEMS
全ての絞り込みを解除

14 件のレコードが見つかりました。 1件目から10件目まで表示します。

全ての絞り込みを解除
[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
雑誌
コレクション
Research Highlights
著者
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (この著者で検索)
National Institute for Materials Science
キーワード
GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
刊行年月日
2021-07-13
更新時刻
2023-12-26 21:38:08 +0900
manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
ジャーナル論文
著者
Kotaro Naruse (author) (この著者で検索)
;
Naru Kato (author) (この著者で検索)
;
Takuma Matsumori (author) (この著者で検索)
;
Jun Shlomi (author) (この著者で検索)
;
Yoshihiro Midoh (author) (この著者で検索)
;
Tetsuya Hirose (author) (この著者で検索)
;
Gaku Imamura (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Genki Yoshikawa (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Constantine Sideris (author) (この著者で検索)
;
Noriyuki Miura (author) (この著者で検索)
キーワード
gas sensor, CMOS, MEMS
刊行年月日
2025-02-16
更新時刻
2025-12-25 16:21:05 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
ジャーナル論文
著者
ORCID SAMURAI
キーワード
Ga2O3, TMAH, wet etching, MEMS
刊行年月日
2025-11-01
更新時刻
2025-11-27 08:30:13 +0900
2024.2 STAC-D2MatE.pdf
Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching
会議発表ポスター
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Keyun Gu (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Liwen Sang (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Zhaohui Huang (author) (この著者で検索)
China University of Geosciences
;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-11-04 10:30:56 +0900
NDNC2026_abstract.pdf
Ultrathin Diamond NEMS Cantilevers with Enhanced Frequency Stability for High-Sensitivity Mass Sensing
会議発表ポスター
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zhaozong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-10-13 10:07:38 +0900
AFM-resonator_sensor-20230307　.pdf
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
ジャーナル論文
著者
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Wen Zhao (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science
;
Masaya Toda (author) (この著者で検索)
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Diamond, MEMS, Magnetic sensors
刊行年月日
2023-03-27
更新時刻
2024-07-04 16:30:34 +0900
講演予稿集 16p-A408-1.pdf
Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers
プロシーディングス論文
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Liwen Sang (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
ORCID ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-10-13 16:46:48 +0900
041124_1_5.0250902-min.pdf
High-order resonance enhancing the mass sensitivity of diamond cantilevers
ジャーナル論文
著者
Wen Zhao (author) (この著者で検索)
ORCID ;
Guo Chen (author) (この著者で検索)
ORCID ;
Keyun Gu (author) (この著者で検索)
ORCID ;
Masaya Toda (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-04-01
更新時刻
2025-07-12 08:30:35 +0900
edtm2025-paper-template-word_Liao 10.26.pdf
Single-Crystal Diamond MEMS for Extreme Sensors
プロシーディングス論文
著者
ORCID SAMURAI
キーワード
Diamond, MEMS, sensors
刊行年月日
2025-03-09
更新時刻
2025-07-29 16:30:25 +0900
23p-12E-6.pdf
Air Damping Effect on Quality-Factor in High-Order Resonance Modes of Single-Crystal Diamond Microcantilevers
プロシーディングス論文
著者
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Keyun G (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Liwen Sang (author) (この著者で検索)
National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials Field/Thin Film Electronics Group
ORCID ;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Zhaohui Huang (author) (この著者で検索)
China University of Geosciences
;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
更新時刻
2026-10-13 16:40:16 +0900
絞り込み