9 records found.
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
- Article
- Creator
-
Kotaro Naruse
;
Naru Kato
;
Takuma Matsumori
;
Jun Shlomi
;
Yoshihiro Midoh
;
Tetsuya Hirose
;
Gaku Imamura
;
Genki Yoshikawa
;
Constantine Sideris
;
Noriyuki Miura
- Keyword
- gas sensor, CMOS, MEMS
- Date published
- 2025-02-16
- Updated at
- 2025-12-25 16:21:05 +0900
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
- Article
- Creator
-
Takayoshi Oshima
- Keyword
- Ga2O3, TMAH, wet etching, MEMS
- Date published
- 2025-11-01
- Updated at
- 2025-11-27 08:30:13 +0900
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
- Article
- Creator
-
Takayoshi Oshima
;
Yuichi Oshima
- Keyword
- β-Ga2O3, cantilever, air bridge, MEMS
- Date published
- 2025-12-31
- Updated at
- 2025-09-04 12:30:25 +0900
Single-Crystal Diamond MEMS for Extreme Sensors
- Proceedings
- Creator
-
Meiyong Liao
- Keyword
- Diamond, MEMS, sensors
- Date published
- 2025-03-09
- Updated at
- 2025-07-29 16:30:25 +0900
High-order resonance enhancing the mass sensitivity of diamond cantilevers
- Article
- Creator
-
Wen Zhao
;
Guo Chen
;
Keyun Gu
;
Masaya Toda
;
Yasuo Koide
;
Meiyong Liao
- Keyword
- Diamond, MEMS
- Date published
- 2025-04-01
- Updated at
- 2025-07-12 08:30:35 +0900
A perspective on diamond MEMS magnetic sensors
- Article
- Creator
-
Zilong Zhang
;
Keyun Gu
;
Masaya Toda
;
Meiyong Liao
- Keyword
- Diamond, MEMS, magnetic sensors
- Date published
- 2025-03-01
- Updated at
- 2025-05-19 16:30:19 +0900
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
- Article
- Creator
-
Guo Chen
;
Zilong Zhang
;
Yasuo Koide
;
Satoshi Koizumi
;
Zhaohui Huang
;
Meiyong Liao
- Keyword
- Diamond, MEMS
- Date published
- 2023-07-26
- Updated at
- 2025-07-26 08:30:34 +0900
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
- Article
- Creator
-
Zilong Zhang
;
Wen Zhao
;
Guo Chen
;
Masaya Toda
;
Satoshi Koizumi
;
Yasuo Koide
;
Meiyong Liao
- Keyword
- Diamond, MEMS, Magnetic sensors
- Date published
- 2023-03-27
- Updated at
- 2024-07-04 16:30:34 +0900
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
- Magazine
- Collection
- Research Highlights
- Creator
- International Center for Materials Nanoarchitectonics (WPI-MANA)
- Keyword
- GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
- Date published
- 2021-07-13
- Updated at
- 2023-12-26 21:38:08 +0900