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9 records found.

manuscript.pdf
20.1 A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack
Journal article
Creator
Kotaro Naruse (author) (Search by this author)
;
Naru Kato (author) (Search by this author)
;
Takuma Matsumori (author) (Search by this author)
;
Jun Shlomi (author) (Search by this author)
;
Yoshihiro Midoh (author) (Search by this author)
;
Tetsuya Hirose (author) (Search by this author)
;
Gaku Imamura (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Genki Yoshikawa (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Constantine Sideris (author) (Search by this author)
;
Noriyuki Miura (author) (Search by this author)
Keyword
gas sensor, CMOS, MEMS
Date published
2025-02-16
Updated at
2025-12-25 16:21:05 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
Journal article
Creator
ORCID SAMURAI
Keyword
Ga2O3, TMAH, wet etching, MEMS
Date published
2025-11-01
Updated at
2025-11-27 08:30:13 +0900
Fabrication of -Ga2O3 air-gap structures on 001 -Ga2O3 using HCl gas etching.pdf
Fabrication of β-Ga 2 O 3 /air-gap structures on (001) β-Ga 2 O 3 using HCl gas etching
Journal article
Creator
ORCID SAMURAI ; ORCID SAMURAI
Keyword
β-Ga2O3, cantilever, air bridge, MEMS
Date published
2025-12-31
Updated at
2025-09-04 12:30:25 +0900
edtm2025-paper-template-word_Liao 10.26.pdf
Single-Crystal Diamond MEMS for Extreme Sensors
Conference paper
Creator
ORCID SAMURAI
Keyword
Diamond, MEMS, sensors
Date published
2025-03-09
Updated at
2025-07-29 16:30:25 +0900
041124_1_5.0250902-min.pdf
High-order resonance enhancing the mass sensitivity of diamond cantilevers
Journal article
Creator
Wen Zhao (author) (Search by this author)
ORCID ;
Guo Chen (author) (Search by this author)
ORCID ;
Keyun Gu (author) (Search by this author)
ORCID ;
Masaya Toda (author) (Search by this author)
; ORCID SAMURAI ; ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2025-04-01
Updated at
2025-07-12 08:30:35 +0900
perspective-20241226.pdf
A perspective on diamond MEMS magnetic sensors
Journal article
Creator
ORCID ;
Keyun Gu (author) (Search by this author)
;
Masaya Toda (author) (Search by this author)
ORCID ; ORCID SAMURAI
Keyword
Diamond, MEMS, magnetic sensors
Date published
2025-03-01
Updated at
2025-05-19 16:30:19 +0900
Revised Maunscript (clean version) .pdf
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
Journal article
Creator
Guo Chen (author) (Search by this author)
;
Zilong Zhang (author) (Search by this author)
;
Yasuo Koide (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
;
Zhaohui Huang (author) (Search by this author)
;
Meiyong Liao (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS
Date published
2023-07-26
Updated at
2025-07-26 08:30:34 +0900
AFM-resonator_sensor-20230307　.pdf
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
Journal article
Creator
Zilong Zhang (author) (Search by this author)
National Institute for Materials Science
ORCID ;
Wen Zhao (author) (Search by this author)
;
Guo Chen (author) (Search by this author)
National Institute for Materials Science
;
Masaya Toda (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Yasuo Koide (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Meiyong Liao (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI
Keyword
Diamond, MEMS, Magnetic sensors
Date published
2023-03-27
Updated at
2024-07-04 16:30:34 +0900
[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
Magazine
Collection
Research Highlights
Creator
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)
National Institute for Materials Science
Keyword
GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
Date published
2021-07-13
Updated at
2023-12-26 21:38:08 +0900