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Tanuma, Shigeo
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表面電子分光法における信号の減衰はいかに記述されるか? II. 誘電関数とIMFP
Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
Calculations of Mean Escape Depths of Photoelectrons in Elemental Solids Excited by Li...
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
Calculations of electron inelastic mean free paths. XIII. Data for 14 organic compound...
電子線マイクロアナライザーによるMg-Ge合金の定量 -Mg Kαに対するGeの質量吸収係数の検討- and Electron microprobe analysis of...
InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
Calculations of Electron Inelastic Mean Free Paths III. Data for 15 Inorganic compou...
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Ef...
Calculations of Electron Inelastic Mean Free Paths. XI. Data for Liquid Water for Ener...
Experimental Determination of Electron Inelastic Mean Free Paths in 13 Elemental Solid...
Calculation of Electron Inelastic Mean Free Paths (IMFPs). VII. Reliability of the TPP...
InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
Calculations of Electron Inelastic Mean Free Paths (IMFPs). XIV. Calculated IMFPs for...
Calculations of electron inelastic mean free paths. XII. Data for 42 inorganic compou...
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Hol...
Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids o...
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at th...
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Type of work
Publication
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Keyword
IMFP
7
Auger Depth Profiling Analysis
6
electron inelastic mean free paths
5
TPP-2M
4
Electron Inelastic Mean Free Path
2
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Language
English
9
Japanese
8
日本語
1
Publisher
Surface Analysis Society of Japan
6
Wiley
6
Elsevier
1
John Wiley and Sons, Ltd.
1
SASJ
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Article
18
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open
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Rights Statement Sim
In Copyright
8
Creative Commons BY-NC Attribution-NonCommercial 4.0 International
6
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
4
Material/Specimen
C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au
1
26-n-paraffin
1
GaAs
1
GaAs/AlAs Superlattice
1
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
1
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Date accepted
2002
1
2004
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2017
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Date submitted
2021
1
Author
Tanuma, Shigeo
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18
Ogiwara, Toshiya
7
Shinotsuka, Hiroshi
4
Penn, D. R.
3
Powell, C. J.
3
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License
https://creativecommons.org/licenses/by-nc-nd/4.0/
4
Journal
Journal of Surface Analysis
6
SURFACE AND INTERFACE ANALYSIS
4
Surface and Interface Analysis
4
Journal of The Surface Science Society of Japan
2
Journal of Electron Spectroscopy and Related Phenomena
1
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