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Tanuma, Shigeo
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Japanese
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Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
電子線マイクロアナライザーによるMg-Ge合金の定量 -Mg Kαに対するGeの質量吸収係数の検討- and Electron microprobe analysis of...
InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Ef...
InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Hol...
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at th...
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Type of work
Publication
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8
Keyword
Auger Depth Profiling Analysis
6
GaAs/AlAs Superlattice
2
Inclined Holder
2
Sample Cooling Method
2
Si/Ge multiple delta-doped layers
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Japanese
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Surface Analysis Society of Japan
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Surface Science Society of Japan
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The Surface Science Society of Japan
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Article
8
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open
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In Copyright
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Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
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Material/Specimen
GaAs
1
GaAs/AlAs Superlattice
1
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
1
GaP
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GaSb
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Date accepted
2017
1
Author
Tanuma, Shigeo
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8
Ogiwara, Toshiya
7
Kim, Kyung Joong
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Nagatomi, Takaharu
2
Ikeo, Nobuyuki
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https://creativecommons.org/licenses/by-nc-nd/4.0/
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Journal
Journal of Surface Analysis
5
Journal of The Surface Science Society of Japan
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Journal of Surface Analysis
1